离子束增强沉积CrN镀层及热力学分析Analyses of Cr\|N Coatings by Ion Beam Enhanced Deposition and Thermodynamics
唐宾
摘要(Abstract):
利用IBED 技术,在Si(111) 和GCr15 轴承钢基体上沉积CrN 镀层。研究N+ + N+2 离子轰击能量和Nions/Cratoms 到达比对镀层组织结构的影响。结果表明,氮离子轰击能量的增加促进CrNCrN(200) 择尤生长;但Nions/Cr atoms 比从1.45 ×10 - 2 增至3.67 ×10 - 2 和5.87 ×10 - 2时,镀层中CrN 组分非但没有增多,Cr 反而以Cr2O3 形态存在。
关键词(KeyWords): 离子束增强沉积(IBED);CrN;组织结构;热力学
基金项目(Foundation):
作者(Author): 唐宾
参考文献(References):
- 1 Wolf GK. Modification of mechanicalandchemicalpropertiesofthinfilmsbyion bombardment.Surfand Coat Technol,1990 ,43/44 :920 .
- 2 TerratJP,Gaucher A,HadjRabah H,Fillit RY.Structureand mechanicalpropertiesofreactivelysputteredchromium nitrides.Surfand Coat Technol,1991 ,45:59 .
- 3 Sugiyman Kenji,Hayashi K,Sasaki J,Ichiko O,Hashiguchi Y. Microstructure and wear behaviour of chromium nitridefilmsformed byionbeamenhanced deposition.Surfand Coat Technol,1994,66 :505 .
- 4 Su YS,Yao SH. Wu CT.Comparisonsofcharacterizationsandtribologicalperformanceof TiNand CrNdeposited by cathodic arc plasma deposition process. Wear,1996 ,199 ;132 .
- 5 Lin Jenfin,Liu Minghuang ,Wu Jenydow . Analysis ofthefriction and wear mechanisms ofstructuralceramic coatings.Wear,1996 ,194 :1 .
- 6 Sugiyama Kenji,Hayashi Kazunori,SasakiJun.Basic characteristics of chromium nitridefilms by dynamicion beam mixing. NuclInstr Meth,1993 ,B80/81 :1376.
- 7 赵化侨. 等离子体化学与工艺. 合肥:中国科学技术大学出版社,1993.83 .
- 8 Tamulevicius S,Pranevicius L.Ionbeamassisted processon thesurface ofsolid.Surfand Coat Technol,1995 ,71:239 .
- 9 JAlbert Sue,Authong JPerrgandJVetter.Young′s modulesandstressofCrNdeposited by cathodicvacuum arcevaporation.Surfand Coat Technol,1994 ,68/69:126.
- 10 Lee ShenChin,Ho WeiYu,Pao WenLon.Processand propertiesof CrNcoating depositedon plasmanitrided highspeedsteel.Surfand Coat Technol,1995 ,73 :34 .
- 11 徐可为,白辰东,何家文. Ti(C,N)薄膜的复合硬度与本征硬度的研究. 金属学报,1995 ,31(9) :429 .
- 12 Huble R,Schroer A,Ensing W,Wolf GK.Plasmaandionbeamassisted deposition of multilayerfortribologicalandcorrosion protection .Surfand Coat Technol,1993 ,60:561.
- 13 Wagner CD,Riggs W M,Davis LE,MoulderJF.Handbook of Xray photoelectron spectroscopy,Minnesota 55344 :Eden Prairie,1979 .
- 14 Friedrich C,Berg G,Broszeit E,Kloos K H.Xray diffractometry analysisofr.f.sputtered hard coating based on nitridesof Ti,Cr,Hf.Surfand Coat Technol,1995,74/75 :279 .
- 15 Tamulericius S,Pranevicius L.Ionbeamassisted processonthesurface ofsolid.Surfand Coat Technol,1995 ,71 :239 .
- 16 Mattox D M.Particle bombardmenteffectson thinfilm deposition:Areview .JVac Sci Technol.1989 ,A7(3):1105 .
- 17 Muehlberger DE.Ion platingandIonImplantation ;Applicationto Materials.Edited by Hochman RF.American Societyfor Metals Conference Proceeding,86.,Cleveland,1986 .10:75 .
- 18 Valyi L.Atom and Ion Sources.New York :Wiley,1977 .
- 19 Thorsten Kacsich,KlausPeter Lieb. Oxidation of thin CrNand Cr2Nfilms analyzed Via nuclear reaction analysis andRutherford backscattering.Thin Solid Films,1994 ,235 :4 .
- 20 石霖.合金热力学.北京:机械工业出版社,1992 ,523 .
- 21 高本辉,崔素言. 真空物理.北京:科学出版社,1983 ,490 .
- 22 Colligon JS.Applications ofionbeamassisted deposition . Materials Science and Engineering.1991,A139 :199 .
- 23 Lai FD,WuJK.Hightemperatureand corrosion propertiesofcathodicarcdeposited CrNcoatings.Surfand Coat Technol,1994,64 :53 .
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