李学梅,尤建飞,董松涛,汪蕾,许俊华

• 1:江苏科技大学材料学院先进焊接技术重点实验室

摘要(Abstract)：

采用磁控反应溅射法制备了一系列Al含量不同的Ti-Si-Al-N纳米复合薄膜,采用X射线衍射仪、扫描电子显微镜及配套能量色散谱仪研究了Al含量对薄膜组织结构、硬度及高温抗氧化性的影响。结果表明:Ti-Si-Al-N薄膜点阵常数随Al含量的增加呈下降趋势;Al含量增加到6.48at%时出现h-AlN相,此时薄膜具有最高的硬度,约33GPa;薄膜的抗氧化温度提高到约900℃,但Al含量较高易导致薄膜晶粒在高温下长大。

关键词(KeyWords)： Ti-Si-Al-N复合膜;显微硬度;高温抗氧化性;磁控反应溅射法

Abstract:

Keywords:

基金项目(Foundation): 国家自然科学基金资助项目(50574044)

作者(Author): 李学梅,尤建飞,董松涛,汪蕾,许俊华

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