张旭海,陈倩栎,蒋建清,方峰,江静华,曾宇乔

• 1:江苏省先进金属材料高技术研究重点实验室
• 2:东南大学材料科学与工程学院

摘要(Abstract)：

在Ar气条件下,对反应磁控溅射法制备的TiAlCN涂层进行500~1100℃热处理。采用XRD、Raman和DSC,研究不同热处理温度下涂层微观结构的变化,利用显微硬度计和划痕仪研究热处理对涂层性能的影响。结果表明,经600~800℃热处理后,涂层非晶碳相明显增加,使涂层形成纳米复合结构,这导致显微硬度显著增加,膜基结合性能增加;在900~1100℃热处理后,由于涂层中六方AlN相的析出,导致涂层显微硬度急剧下降,且韧性下降。

关键词(KeyWords)： TiAlCN;热处理;硬度

Abstract:

Keywords:

基金项目(Foundation): 国家重大基础研究前期研究专项资助项目(2002CCA02000);; 江苏省自然科学基金资助项目(BK2002062)

作者(Author): 张旭海,陈倩栎,蒋建清,方峰,江静华,曾宇乔

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