钕铁硼表面真空蒸镀Al膜的制备及其性能Preparation and properties of Al coating on sintered NdFeB magnet surface via vacuum evaporations
刘家琴,曹玉杰,张鹏杰,张浩,衣晓飞,陈静武,吴玉程
摘要(Abstract):
为了提高烧结NdFeB磁体的耐腐蚀性能,采用真空蒸镀的方法在烧结NdFeB磁体表面沉积Al薄膜,并对工艺过程中的工艺参数进行优化。结果表明:真空室温度对Al薄膜的结构及耐腐蚀性能基本没有影响,但温度过高会导致Al薄膜表面岛状结构的增大,造成Al薄膜的厚度一致性难以控制;随着蒸发源温度的增加,Al薄膜的沉积速率逐渐增加,但是随着蒸镀时间的延长,Al薄膜的沉积效率逐渐降低,这是由于Al蒸发原子在基片上冷凝沉积的物理驱动力下降导致的。采用最佳工艺参数制备的厚度为8μm的Al薄膜,耐中性盐雾试验时间可达60 h,且Al镀层的涂覆对NdFeB磁体的磁性能基本没有影响。
关键词(KeyWords): 烧结钕铁硼;永磁材料;真空蒸镀;Al薄膜;耐腐蚀性能
基金项目(Foundation): 国家科技支撑计划项目(2012BAE02B01);; 安徽省自然科学基金(1408085MKL72,1408085MKL73)
作者(Author): 刘家琴,曹玉杰,张鹏杰,张浩,衣晓飞,陈静武,吴玉程
DOI: 10.13289/j.issn.1009-6264.2017.03.025
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