AFM Study on Reliability of Nanoscale DLC Films Deposited by ECR-MPCVDAFM Study on Reliability of Nanoscale DLC Films Deposited by ECR-MPCVD
摘要(Abstract)：
关键词(KeyWords)：
基金项目(Foundation):
作者(Author):
参考文献(References)：
- 1Robertson J.Diamond like amorphous carbon.Materials Science and Engineering R,2002,37:129-281.
- 2Fung M K.Mechanical properties and corrosion studies of amorphous carbon on magnetic disks prepared by ECR plasma technique.Thin Solid Films,2000,368:198-202.
- 3Liu E.Calibration procedures for frictional measurements with a lateral force microscope.Wear,1996,192:141-150.
- 4Sriram Sundararajan.Micrornanotribology of ultra-thin hard amorphous carbon coatings using atomic force/friction force microscopy.Wear,1999,225-229:678-689.
- 5Wu Weng-Jin,Min-Hsiung Hon.The effect of residual stress on adhesion of silicon-containing diamond-like carbon coatings.Thin Solid Films,1999,345:200-207.
- 6Yang W.Mechatronic Reliability.Beijing:Qsinghua University Publishing House,2001,11-13.
文章评论(Comment)：
|
||||||||||||||||||
|
||||||||||||||||||