吕珺,周丽萍,汪冬梅,吴玉程,郑治祥

• 1:合肥工业大学材料科学与工程学院

摘要(Abstract)：

通过溶胶-凝胶法制备了不同Al-F掺杂浓度的ZnO薄膜,研究了薄膜的晶体结构、表面形貌、电阻率和透光性随着掺杂浓度的变化情况。结果表明:制备的ZnO∶F∶Al薄膜具有高度的C轴择优取向性,薄膜表面平整、晶粒均匀致密。当Al3+和F-的掺杂浓度皆为0.75at%时,薄膜的平均晶粒尺寸最大为43.8nm;导电性能最好,电阻率可低至1.02×10-2Ω.cm;在可见光范围内薄膜的平均透过率超过90%,吸收边出现明显的蓝移现象。

关键词(KeyWords)： ZnO薄膜;溶胶-凝胶;Al-F共掺杂;掺杂浓度;光电性能

Abstract:

Keywords:

基金项目(Foundation): 合肥工业大学中青年科技创新群体专项(103-037016)

作者(Author): 吕珺,周丽萍,汪冬梅,吴玉程,郑治祥

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