朱丽娜,王淑庆,岳文,付志强,康嘉杰,王成彪

• 1:中国地质大学(北京)工程技术学院
• 2:深钻装备国际联合研究中心

摘要(Abstract)：

采用多弧离子镀技术在316L不锈钢基体上制备厚度约为1.2μm的AlCrN薄膜。用扫描电镜(SEM)、能谱仪(EDS)、X射线衍射仪(XRD)和纳米压痕仪研究大气环境和真空环境下热处理后,AlCrN薄膜的成分、相结构、表面形貌和纳米力学性能随热处理温度的变化规律。结果表明:在大气环境下,AlCrN薄膜在800℃时发生了氧化,纳米硬度明显降低,但H~3/E~2值仅产生了轻微的减小,AlCrN薄膜在大气高温环境下具有较好的抵抗塑性变形和裂纹萌生的能力;在真空环境下,随着热处理温度的升高,AlCrN薄膜的孔隙率和粗糙度呈现先增大后减小的趋势,而薄膜的硬度则呈现出先减小后增大的规律,在800℃真空热处理后,AlCrN薄膜的致密度较高,纳米力学性能最为优异。

关键词(KeyWords)： AlCrN薄膜;热处理;组织结构;纳米力学性能

Abstract:

Keywords:

基金项目(Foundation): 北京市自然科学基金(3164049);; 国家自然科学基金(51605451);; 中央高校基本业务费优秀教师项目(2652015070)

作者(Author): 朱丽娜,王淑庆,岳文,付志强,康嘉杰,王成彪

DOI: 10.13289/j.issn.1009-6264.2017-0479

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