孙朔,张文,薛建嵘,高选乔,王晖,林小辉

• 1:西北有色金属研究院

摘要(Abstract)：

选用高纯Al靶和CrCoNi靶，采用磁控溅射共沉积的方法制备了不同Al含量的Al_xCrCoNi(x=0.08、0.3和0.7)高熵合金薄膜。对薄膜的表面形貌、成分及内部微观结构进行了表征，并采用纳米压痕及电化学测试分析了薄膜的力学性能和腐蚀性能。结果表明：Al_xCrCoNi薄膜均表现出较好的均匀性和致密性，且随着Al含量的增加，薄膜的微观结构由纳米晶结构逐渐转变成纳米晶和非晶混合的双相结构；在相同的纳米压痕测试条件下，Al-0.3薄膜的硬度值最高。电化学测试结果表明，Al-0.7薄膜的腐蚀电流密度最低，拟合电路的总电阻最高，表现出较为优异的耐腐蚀性能。理论分析可知，一定体积分数的非晶可以有效提高薄膜的硬度，且非晶的存在可以有效阻碍腐蚀离子的扩散，因此显著改善薄膜的耐腐蚀性能。

关键词(KeyWords)： 高熵合金;组织结构;力学性能;耐腐蚀性

Abstract:

Keywords:

基金项目(Foundation): 西北有色金属研究院种子创新专项(ZZNR2201);西北有色金属研究院院控项目(YK2301);; 陕西省科技厅秦创原引用高层次创新创业人才项目(QCYRCXM-2022-164)

作者(Author): 孙朔,张文,薛建嵘,高选乔,王晖,林小辉

DOI: 10.13289/j.issn.1009-6264.2023-0286

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