周建新,徐宏,张莉,刘京雷,戚学贵

• 1:华东理工大学机械与动力工程学院
• 2:华东理工大学机械与动力工程学院
• 3:华东理工大学机械与动力工程学院
• 4:华东理工大学机械与动力工程学院

摘要(Abstract)：

为了减缓乙烯裂解炉管内表面的结焦,采用常压化学气相沉积方法,以二甲基二硫(DMDS)和正硅酸乙酯(TEOS)为先驱体,在预氧化的HP40合金试样上制备了SiO2/S复合涂层。分析了沉积温度、气体流速和沉积时间对涂层沉积速率的影响。利用扫描电镜、XPS和Raman光谱分别对涂层的形貌、成分和化学结构进行了表征,并对预氧化试样与涂层的结合进行了实验研究。结果表明,涂层主要由三节环Si-O-Si结构和Si-O-S结构组成,预氧化的试样涂层沉积速率是未氧化试样的2~3倍,试样氧化后涂层的抗热冲击性能和结合强度得到了提高。

关键词(KeyWords)： 常压化学气相沉积;SiO2/S复合涂层;HP40合金;预氧化

Abstract:

Keywords:

基金项目(Foundation):

作者(Author): 周建新,徐宏,张莉,刘京雷,戚学贵

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