孙瑶,汪洪

• 1:中国建筑材料科学研究总院国家玻璃深加工工程技术中心
• 2:中国建筑材料科学研究总院绿色建筑材料国家重点实验室
• 3:中国建筑材料科学研究总院太阳能与建筑节能玻璃材料加工技术北京市重点实验室

摘要(Abstract)：

以金属Ag作为红外反射功能层的低辐射多层膜受热易产生团聚,严重损害导电性与低辐射性能。本文提出在金属Ag膜层中掺杂Ti元素,研究Ti掺杂对Ag基低辐射多层膜的团聚抑制作用以及对热处理后性能的影响。采用磁控溅射制备SiN_x/Ag/Si Nx与Si Nx/Ag-Ti(1.1 at%)/Si Nx多层膜,其中Ag(Ti)层厚度为20 nm,并进行真空与非真空热处理(大气环境)。通过对比有无Ti掺杂的Ag基多层膜热处理前后的背散射电子形貌、面电阻、辐射率与透光率,发现无论真空还是非真空热处理,Ti掺杂均显著提高Ag膜的热稳定性,抑制团聚的生成。热处理后的面电阻、辐射率与透光率均显著优于未掺杂Ag基多层膜。进一步,观察背散射电子形貌随热处理温度的变化,分析了无掺杂Ag膜团聚的形成过程,并推测了Ti掺杂对Ag膜团聚的抑制机理。

关键词(KeyWords)： 低辐射;银膜;团聚;热稳定性;掺杂

Abstract:

Keywords:

基金项目(Foundation): 国家自然科学基金(51272245);; 北京市科技创新基地培育与发展专项(Z151100001615038)

作者(Author): 孙瑶,汪洪

DOI: 10.13289/j.issn.1009-6264.2016.08.033

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