陈玉武,郝秋艳,刘彩池,赵建国,王立建,吴丹

• 1:河北工业大学信息功能材料研究所

摘要(Abstract)：

采用微波光电导衰减法(μ-PCD)、扫描电镜等测试技术,研究了快速热处理(RTP)对铸造多晶硅片表面缺陷形貌以及少子寿命特性的影响。结果表明:铸造多晶硅片经低中温(750、850和950℃)RTP时,硅片的少子寿命明显降低,其中在950℃、保温30s时硅片的少子寿命下降幅度最大;当硅片经高温1050℃RTP时,硅片的少子寿命急剧增大,最大幅度达到初始寿命值的4.3倍。另一方面,保温时间对硅片少子寿命也有很大影响,一定RTP温度下,随着保温时间的增加,硅片的少子寿命逐渐增大。

关键词(KeyWords)： 铸造多晶硅;少子寿命;快速热处理(RTP);缺陷

Abstract:

Keywords:

基金项目(Foundation): 国家自然科学基金(50572022);; 河北省教育厅资助项目

作者(Author): 陈玉武,郝秋艳,刘彩池,赵建国,王立建,吴丹

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