李金龙,马欣新,孙明仁

• 1:哈尔滨工业大学材料科学与工程学院
• 2:哈尔滨工业大学材料科学与工程学院
• 3:哈尔滨工业大学材料科学与工程学院 黑龙江哈尔滨150001
• 4:黑龙江哈尔滨150001

摘要(Abstract)：

采用等离子体基氧离子注入技术对Ti6A14V合金进行表面改性。注入负脉冲电压分别为10、20、30、40、50kV,注入剂量为0.6×10~(17)ions/cm~2。用XPS分析了注氧层中元素的分布和化学态。结果显示,注入电压增加,氧的浓度深度分布增加。注入氧元素的浓度深度分布曲线不同于束线式注入氧元素的类高斯分布,表面氧浓度最大,随着深度的增加出现一个略倾斜的氧浓度平台,该平台的宽度随注入电压增加而增加。氧离子注入引起基体元素Ti、Al、V的浓深分布发生变化,近表面区域Ti的原子百分含量减少,Al的含量增高,而V未检测到。并且随着注入电压的增加,近表面区域富集Al的浓度明显增加,富Al贫V的区域也明显加大。注入样品的改性层具有相似的层状结构,由表及里依次为表面污染层、TiO_2和Al_2O_3组成薄的外层、内层在改性层中占的比例最大,由TiO_2、Ti_2O_3、TiO、Ti、Al、Al_2O_3、V和VO组成。

关键词(KeyWords)： Ti6A14V;氧等离子体基离子注入;X射线光电子能谱;层状结构

Abstract:

Keywords:

基金项目(Foundation): 高等学校博士学科点专项科研基金(20040213048)

作者(Author): 李金龙,马欣新,孙明仁

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