刘绰,张雷,马蕾,彭英才

• 1:河北大学电子信息工程学院
• 2:河北大学河北省数字医疗工程重点实验室

摘要(Abstract)：

采用真空热蒸发方法,以高纯CdTe粉末为蒸发源,在石英和AZO玻璃上沉积了厚度约为485 nm的CdTe薄膜,随后在N2氛围中于250~400℃条件下进行后退火处理。利用X射线衍射仪、拉曼光谱仪、分光光度计和数字源表测量了不同退火温度条件下样品的结构、光学和电学特性。结果表明,所制备的薄膜为立方闪锌矿结构,择优取向为<111>晶向,提高退火温度可以促进薄膜结晶;光学测量结果证实,随退火温度升高,薄膜样品的光学带隙由1.527 e V减小到1.496 e V;电流-电压测试表明,薄膜电导率随退火温度的增加,由0.97μS/cm增大至87.3μS/cm。

关键词(KeyWords)： 真空热蒸发;CdTe薄膜;退火处理;结构特性

Abstract:

Keywords:

基金项目(Foundation): 河北大学校内人才培养项目

作者(Author): 刘绰,张雷,马蕾,彭英才

DOI: 10.13289/j.issn.1009-6264.2017.03.026

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