磁控溅射CrAlYN涂层的硬度和抗氧化性能Hardness and oxidation resistance of CrAlYN coatings deposited by magnetron co-sputtering
张罡,尹雪,张济,杜晓明,娄长胜
摘要(Abstract):
采用磁控溅射技术,在高速钢基材上沉积了不同Y含量的CrAlYN涂层,进行了900℃下1 h高温氧化试验。通过SEM、EDS、XRD和纳米压痕仪等对涂层元素组成、纳米硬度、弹性模量以及热处理前后的表面形貌和物相组成进行了表征。研究了Y含量对CrAlYN涂层硬度,弹性模量、物相组成和高温抗氧化性能的影响。结果表明:加入Y后涂层没有新的物相形成,但是CrAlN相的衍射峰取向由(200)向(111)转变。与不添加Y的CrAlN涂层相比,Y含量0.41 at%时,涂层的硬度、弹性模量和900℃高温抗氧化性能显著改善。Y含量2.75 at%和3.94 at%时,涂层的综合性能降低。
关键词(KeyWords): 磁控溅射;CrAlYN涂层;抗氧化性能;纳米硬度;弹性模量
基金项目(Foundation): 中国工程物理研究院实验室开放基金(2014121901-03)
作者(Author): 张罡,尹雪,张济,杜晓明,娄长胜
DOI: 10.13289/j.issn.1009-6264.2016.07.033
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