李刚,卢黎明

• 1:华东交通大学机电工程学院

摘要(Abstract)：

采用热CVD方法直接在平面硅基底上成功地制备出定向碳纳米管薄膜。在反应中,镍过渡金属作为催化剂,碳氢化合物乙炔作为碳源,研究了催化剂薄膜厚度对高温氨气预处理后单晶硅衬底上沉积的催化剂镍膜的纳米结构形貌和所生长的定向碳纳米管薄膜等的影响规律。通过扫描电子显微镜(SEM)观察表明,高温刻蚀后,纳米镍颗粒的平均直径一定程度上取决于薄膜的原始厚度,且颗粒密度也取决于薄膜原始厚度,由于氨气的介入,厚为5～10 nm的镍催化剂薄膜具有高的颗粒数密度;碳纳米管的直径随催化剂薄膜厚度单调增大,而其长度随催化剂厚度的增加先增加后减少,且其定向程度随催化剂厚度的增加是先增强后减弱。

关键词(KeyWords)： 化学气相沉积;定向碳纳米管;刻蚀;纳米颗粒

Abstract:

Keywords:

基金项目(Foundation): 国家自然科学基金(51065009);; 江西省教育厅青年科学基金项目(GJJ11095)

作者(Author): 李刚,卢黎明

DOI: 10.13289/j.issn.1009-6264.2012.02.005

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