孙亚明,华中,姜雨虹,王志群

• 1:吉林师范大学物理国家级实验教学示范中心
• 2:国网内蒙古东部电力有限公司经济技术研究院

摘要(Abstract)：

采用磁控溅射法沉积Cu/Sn/ZnS和Cu/Sn/ZnS/Cu/Sn/ZnS/Cu/Sn/ZnS两种沉积次数不同的预置层薄膜材料,结合后硫化热处理制备铜锌锡硫(Cu_2ZnSnS_4,CZTS)薄膜,研究了不同循环沉积次数对CZTS薄膜结构和性能的影响。利用X射线衍射(XRD)、拉曼光谱仪(Raman)、扫描电镜(SEM)和紫外-可见分光光度计(UV-VIS)等研究了薄膜的结构、表面形貌以及薄膜各组分含量和禁带宽度。结果表明:沉积单个周期的Cu/Sn/ZnS预置层薄膜经550℃硫化后的薄膜为单相CZTS薄膜,化学组分接近理想化学计量比,表面颗粒致密且均匀,禁带宽度约为1.47 eV;沉积3个周期的Cu/Sn/ZnS/Cu/Sn/ZnS/Cu/Sn/ZnS预置层薄膜550℃硫化后的化学组分与理想化学计量比相差较远,表面颗粒不均匀。对于沉积时间较长的CZTS薄膜,单个周期沉积的薄膜相对3个周期沉积的薄膜更适合作为CZTS太阳能电池吸收层。

关键词(KeyWords)： Cu_2ZnSnS_4薄膜;磁控溅射;硫化;循环沉积次数

Abstract:

Keywords:

基金项目(Foundation): 吉林省教育厅“十三五”科学技术研究项目(JJKH20191022KJ)

作者(Author): 孙亚明,华中,姜雨虹,王志群

DOI: 10.13289/j.issn.1009-6264.2020-0016

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