刘洪喜,蒋业华,周荣,汤宝寅

• 1:昆明理工大学机电工程学院
• 2:哈尔滨工业大学现代焊接生产技术国家重点实验室

摘要(Abstract)：

用等离子体浸没离子注入与沉积(PIIID)复合强化新技术在AISI440C不锈钢表面制备了类金刚石(DLC)碳膜。膜层表面的原子力显微镜(AFM)形貌显示出DLC膜结构致密均匀。Raman光谱分析结果表明,制备的DLC主要是由金刚石键(sp3)和石墨键(sp2)组成的混合无定形碳膜,且sp3键含量大于10%。以纯石墨棒做阴极,C2H2为工作气体条件下合成的DLC薄膜中,sp3键含量总体上较单纯用石墨作阴极而无工作气体条件下合成的DLC薄膜中sp3键含量高。与基体相比,薄膜试样的显微硬度和摩擦磨损性能均得到了较大改善,最大硬度提高88.7%,磨损寿命延长超过4倍。

关键词(KeyWords)： 类金刚石碳膜(DLC);等离子体浸没离子注入与沉积(PIIID);Raman光谱;AISI440C不锈钢

Abstract:

Keywords:

基金项目(Foundation): 国家自然科学基金项目(50671045);; 云南省自然基金项目(2008ZC021M);; 昆明理工大学分析测试基金(2009-022)

作者(Author): 刘洪喜,蒋业华,周荣,汤宝寅

DOI: 10.13289/j.issn.1009-6264.2010.02.008

参考文献(References)：

• [1]Robertson J.Diamond-like amorphous carbon[J].Materials Science and Engineering R,2002,37:129-136.
• [2]Vasan S Sundaram.Diamond like carbon film as a protective coating for high strength steel and titanium alloy[J].Surface and Coatings Technology,2006,201:2707-2710.
• [3]Hauert R.A review of modified DLC coatings for biological applications[J].Diamond and Related Materials,2003,12:583-586.
• [4]Veli-Matti Tiainen.Amorphous carbon as a bio-mechanical coating-mechanical properties and biological applications[J].Diamond and RelatedMaterials,2001,10:153-156.
• [5]Liang J H,Chen MH,et al.Characteristics of diamond-like carbon filmsynthesized on AISI304 austenite stainless steel using plasma immersion ionimplantation and deposition[J].Nucl Instrum Meth Phys Res B,2007,257:696-699.
• [6]MA Feng,LI Gang,LI He-qing,et al.Diamond-like carbon gradient film prepared by unbalanced magnetron sputtering and plasma immersion ionimplantation hybrid technique[J].Materials Letters,2002,57:82-85.
• [7]Yoou-Bin Guo,Franklin Chau-Nan Hong.Adhesion improvements for diamond-like carbon films on polycarbonate and polymethylmethacrylatesubstrates by ion plating with inductively coupled plasma[J].Diamond and Related Materials,2003,12:946-950.
• [8]聂朝胤,谢红梅,杨娟,等.非平衡磁控溅射Ti掺杂类金刚石薄膜的基本特性[J].材料热处理学报,2008,29(3):147-151.NIE Chao-yin,XIE Hong-mei,YANG Juan,et al.Characteristics of titanium-doped diamond-like carbon films deposited by unbalanced magnetronsputtering[J].Trans Mater and Heat Treatment,2008,29(3):147-151.
• [9]Niederberger L,Holleck H,Leiste H,et al.Alloyed and hydrogenated diamond-like carbon thin films deposited by a new high performancemicrowave low pressure plasma source[J].Surface and Coatings Technology,2003,174-175:708-711.
• [10]Yang P,Huang N,Leng Y X,et al.Activation of platelets adhered on amorphous hydrogenated carbon(a-C:H)films synthesized by plasmaimmersion ion implantation-deposition(PIII-D)[J].Biomaterials,2003,24:2821-2825.
• [11]Elidiane C R,Steven F D,Rita C C R,et al.Amorphous carbon nitrogenated films prepared by plasma immersion ion implantation and deposition[J].Thin Solid Films,2006,515:1561-1564.
• [12]Kwok S C H,Ha P C T,McKenzie D R,et al.Biocompatibility of calcium and phosphorus doped diamond-like carbon thin films synthesized byplasma immersion ion implantation and deposition[J].Diamond and Related Materials,2006,15:893-896.
• [13]Wang S Y,Chu P K,Tang B Y,et al.Improvement of the corrosion property of Cr4Mo4V bearing steel using plasma immersion ion implantation[J].Nucl Instrum Meth Phys Res B,1997,127-128:1000-1003.
• [14]Diou R O,Woollam J A,Katkanant V.Use of Raman scattering to investigate disorder and crystallite formation in as-deposited and annealed carbonfilms[J].Phys Rev B,1984,29:3482-3489.
• [15]Tarrant R N,McKenzie D R,Bilek MMM.Raman characterization of PIII multilayer carbon films[J].Diamond and Related Materials,2004,13:1422-1425.
• [16]LiBassi A,Ferrari A C,Stolojan V,et al.Density,sp3content and internal layering of DLC films by X-ray reflectivity and electron energy lossspectroscopy[J].Diamond and Related Materials.2000,9:771-775.

文章评论(Comment)：