王松,岳文,李星亮,姚克,方鹏

• 1:中煤科工集团西安研究院有限公司
• 2:中国地质大学(北京)
• 3:中航工业集团公司北京航空精密机械研究所

摘要(Abstract)：

利用离子束辅助沉积技术和低温离子渗硫技术制备了二硫化钨/钨掺杂类金刚石(WS2/W-DLC)复合薄膜。采用扫描电子显微镜(SEM)、拉曼光谱仪(Raman)、透射电子显微镜(TEM)、纳米硬度仪(Nano-indenter)和多功能摩擦磨损试验机(UMT)考察了薄膜的微观结构与摩擦学性能。结果表明:制备的薄膜在大气环境下表现出优异的力学性能和超低摩擦的性能,该复合薄膜中,硬质强化相纳米碳化物WC1-x和软质润滑相过渡族金属硫化物WS2、Fe S均匀镶嵌于类金刚石基体内形成复合结构,复合结构是薄膜表现出优异性能的主要原因。

关键词(KeyWords)： 类金刚石(DLC)薄膜;离子束辅助沉积;低温离子硫化

Abstract:

Keywords:

基金项目(Foundation): 国家自然科学基金(51275494;51005218);; 航空科学基金(2014ZB43001)

作者(Author): 王松,岳文,李星亮,姚克,方鹏

DOI: 10.13289/j.issn.1009-6264.2016.02.027

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