退火工艺对CaBi4.3Ti4O15铁电薄膜性能影响Effect of annealing process on properties of CaBi4.3Ti4O15 ferroelectric thin films
范素华,徐静,王培吉,张丰庆
摘要(Abstract):
利用溶胶凝胶法制备了CaBi4.3Ti4O15铁电薄膜材料,研究表明,退火工艺对CaBi4.3Ti4O15铁电薄膜的结构、微观形貌、晶粒取向以及铁电性能影响较大,随着退火温度的提高,晶粒的取向为a轴择优取向,有利于样品的铁电性;气氛对薄膜的电学性能影响也较大,氧气气氛可以很好的抑制氧空位的产生,提高样品的铁电性。在氧气气氛下退火所得到样品的剩余极化强度(2Pr)和矫顽场(2Ec)分别为21.4μC/cm2和27.7kV/mm,介电常数在250±4%范围内,介电损耗在0.005~0.01之间,测试频率为1~1MHz,显示出较好的频率稳定性。
关键词(KeyWords): CaBi4.3Ti4O15;退火工艺;铁电薄膜;铁电性能
基金项目(Foundation): 国家自然科学基金(60471042);; 山东教育厅重点项目(03A02)
作者(Author): 范素华,徐静,王培吉,张丰庆
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