王梦婷,王进,王勇强,马大衍,李浩

• 1:青岛理工大学机械与汽车工程学院
• 2:西安交通大学材料学院

摘要(Abstract)：

采用多弧离子镀和磁控溅射复合技术在H13钢表面制备了不同靶材电流的TiSiCN涂层,采用划痕仪、扫描电镜(SEM)、X射线衍射仪(XRD)、X射线光电子能谱仪(XPS)、摩擦磨损试验机(UMT-3)等研究了靶材电流对涂层的组织结构、力学性能和摩擦磨损性能的影响。结果表明:随着靶材电流的增加,涂层中Ti和Si元素的含量逐渐减小,C元素含量逐渐增加,涂层的表面越来越平整致密。XRD图谱表明涂层中存在SiC、Si_3N_4和C这3种非晶相。随着靶材电流的增加,涂层的硬度先降低后升高,靶材电流最高的涂层具有最优的结合力和最佳的耐磨减摩性能。

关键词(KeyWords)： TiSiCN涂层;组织结构;力学性能;摩擦磨损

Abstract:

Keywords:

基金项目(Foundation): 山东省重点研发计划项目(2019GGX102023)

作者(Author): 王梦婷,王进,王勇强,马大衍,李浩

DOI: 10.13289/j.issn.1009-6264.2021-0184

参考文献(References)：

• [1] Mei H J,Zhao S S,Chen W,et al.Microstructure and residual stress of TiN films deposited at low temperature by arc ion plating[J].Transactions of Nonferrous Metals Society of China,2018,28(7):1368-1376.
• [2] 赵子彤，鞠洪博，刘晨凯，等.氮化钛薄膜研究进展[J].装备机械，2020(4):1-7.ZHAO Zi-tong,JU Hong-bo,LIU Chen-kai,et al.Research progress of titanium nitride thin films[J].Machinery Equipment,2020(4):1-7.
• [3] Chen Q C,Li H A,Wu G Z,et al.Structure vs chemistry:Tribological behavior of TiN films in the nitrogen atmosphere[J].Ceramics International,2020,46(18):28053-28063.
• [4] Zhen Y,Dong J,Gao X M,et al.Friction and wear behavior of TiN films against ceramic and steel balls[J].Tribology International,2018,124:61-69.
• [5] Zhang H H,Li Z Q,He W F,et al.Damage mechanisms evolution of TiN/Ti multilayer films with different modulation periods in cyclic impact conditions[J].Applied Surface Science,2021,540:148366.
• [6] Moritz Y,Saringer C,Tkadletz M,et al.Oxidation behavior of arc evaporated TiSiN coatings investigated by in-situ synchrotron X-ray diffraction and HR-STEM[J].Surface and Coatings Technology,2020(404):126632.
• [7] Li W,Liu P,Zhu X D,et al.Si content dependent microstructure and mechanical properties of CrN/TiSiN nanomultilayered films[J].Materials Science and Engineering A,2014,610:28-32.
• [8] Yang S M,Chang Y Y,Lin D Y,et al.Mechanical and tribological properties of multilayered TiSiN/CrN coatings synthesized by a cathodic arc deposition process[J].Elsevier,2008,202(10):2176-2181.
• [9] 马大衍，马胜利，徐可为.反应磁控溅射制备Ti-Si-N薄膜的摩擦磨损性能[J].中国有色金属学报，2004(8):1308-1312.MA Da-yan,MA Sheng-li,XU Ke-wei.Tribological behavior of Ti-Si-N coatings prepared by magnetron sputtering reactive deposition[J].Chinese Journal of Nonferrous Metals,2004(8):1308-1312.
• [10] Guha S,Das S,Bandyopadhyay A,et al.Investigation of structural network and mechanical properties of Titanium silicon nitride (TiSiN) thin films[J].Journal of Alloys and Compounds,2018,731:347-353.
• [11] Zhu Y B,Dong M P,Li J L,et al.Wear failure mechanism of TiSiN coating at elevated temperatures[J].Applied Surface Science,2019,487:349-355.
• [12] 郭岩，王博，米紫昊.Si和C的存在形态对TiSiCN薄膜微观结构与性能的影响[J].材料保护，2019,52(2):82-86.GUO Yan,WANG Bo,MI Zi-hao.Effects of existing forms of Si and C on microstructure and properties of TiSiCN coatings[J].Materials Protection,2019,52(2):82-86.
• [13] Hatem A,Lin J L,Wei R H,et al.Tribocorrosion behavior of low friction TiSiCN nanocomposite coatings deposited on titanium alloy for biomedical applications[J].Surface and Coatings Technology,2018,347:1-12.
• [14] Wang Y,Li J L,Dang C Q,et al.Influence of bias voltage on structure and tribocorrosion properties of TiSiCN coating in artificial seawater[J].Materials Characterization,2017,127:198-208.
• [15] Eriksson A O,Zhu J Q,Ghafoor N,et al.Ti-Si-C-N thin films grown by reactive arc evaporation from Ti3SiC2 cathodes[J].Journal of Materials Research,2011,26(7):874-881.
• [16] Marchin N,Ashrafizadeh F.Effect of carbon addition on tribological performance of TiSiN coatings produced by cathodic arc physical vapour deposition[J].Surface and Coatings Technology,2021,407:126781.
• [17] Ma D Y,Ma S L,Dong H S,et al.Microstructure and tribological behaviour of super-hard Ti-Si-C-N nano composite coatings deposited by plasma enhanced chemical vapour deposition[J].Thin Solid Films,2005,496(2):438-444.
• [18] 赵瑞山，任鑫，王亮.多弧离子镀与磁控溅射共沉积TiN/TiCN多层膜的高温抗氧化性能[J].材料保护，2017,50(3):11-15.ZHAO Rui-shan,REN Xin,WANG Liang.Oxidation resistance at high-temperature of TiN/TiCN multilayer films prepared by combining multi-arc ion plating and magnetron sputtering technique[J].Materials Protection,2017,50(3):11-15.
• [19] Ren X,Zhao R S,Wang W,et al.Corrosion resistance of TiCN films prepared with combining multi-arc ion plating and magnetron sputtering technique[J].Rare Metal Materials and Engineering,2018,47(7):2028-2036.
• [20] Wang Y,Li J L,Dang C Q,et al.Influence of carbon contents on the structure and tribocorrosion properties of TiSiCN coatings on Ti6Al4V[J].Tribology International,2017,109:285-296.
• [21] 薛增辉，李伟，卢建富.射频磁控溅射法制备TiSiCN纳米复合膜的微观结构和力学性能研究[J].功能材料，2015,46(7):7113-7117.XUE Zeng-hui,LI Wei,LU Jian-fu.Microstructure and mechanical properties of TiSiCN nanocomposite films prepared by RF magnetron sputtering[J].Functional Materials,2015,46(7):7113-7117.
• [22] Li J L,Wang Y,Yao Y R,et al.Structure and tribological properties of TiSiCN coating on Ti6Al4V by arc ion plating[J].Thin Solid Films,2017,644:115-119.

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