卢泽龙,罗来马,黄新民,谌景波,程继贵,朱流,吴玉程

• 1:合肥工业大学材料科学与工程学院
• 2:安徽省有色金属材料与加工工程实验室
• 3:台州学院机械工程学院

摘要(Abstract)：

采用激光辐照处理对Al2O3陶瓷基板进行预处理,经过超声波辅助化学镀在Al2O3陶瓷基板表面成功制备了化学镀铜层。利用场发射扫描电子显微镜(FE-SEM)和能谱(EDS)研究分析了激光辐照预处理前后Al2O3基板表面形貌和Al2O3基板化学镀铜表面以及截面形貌,划痕形貌,并与传统贵金属Pd活化预处理化学镀铜进行对比。试验结果表明:激光辐照处理后Al2O3基板表面出现了大量的微孔和纳米级颗粒凸起,这些表面缺陷易于吸附外来物质成键,实现化学镀铜过程,其中镀层与基底也有较好的结合力;与传统Pd活化预处理化学镀铜对比发现,激光辐照处理避免了繁琐的工艺和贵金属带来的污染,同时生成的化学镀铜层颗粒与颗粒之间融合更好。

关键词(KeyWords)： Al2O3陶瓷基板;激光辐照处理;化学镀铜

Abstract:

Keywords:

基金项目(Foundation): 国际热核聚变实验堆(ITER)计划专项(2014GB121000);; 国家自然科学基金青年基金(51204064);; 中央高校基本科研业务费专项资金资助(2012HGQC0032);; 浙江省自然科学基金面上项目(LY12E02003)

作者(Author): 卢泽龙,罗来马,黄新民,谌景波,程继贵,朱流,吴玉程

DOI: 10.13289/j.issn.1009-6264.2014.10.034

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