Si掺杂对纳米硬质CrAlN涂层结构及性能影响Effect of Si doping on structure and properties of CrAlN nanometer hard coatings
邰清安,柳琪,国振兴,王进,马大衍,宋忠孝
摘要(Abstract):
采用真空阴极电弧离子镀技术在V-4E工具钢表面制备了CrAlN、CrAlSiN两种多元纳米硬质涂层。采用划痕仪、工具显微镜、显微硬度计、球磨仪、SEM、EDS、XRD、TEM及XPS分析了涂层的力学性能、摩擦学性能以及微结构。结果表明:与CrAlN涂层相比,CrAlSiN涂层中Si的掺杂能使晶粒细化,提高涂层硬度和耐磨性、优化膜基结合水平;CrAlSiN涂层中的立方相CrN由(111)择优取向向(200)择优取向转变,晶粒尺寸明显减小,相结构为非晶态Si_3N_4包覆纳米晶复合混合框架结构。
关键词(KeyWords): 真空阴极电弧离子镀;纳米硬质涂层;晶粒细化;耐磨性
基金项目(Foundation):
作者(Author): 邰清安,柳琪,国振兴,王进,马大衍,宋忠孝
DOI: 10.13289/j.issn.1009-6264.2017-0204
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