M50钢表面等离子体基离子注入碳氮共渗层的微观结构Microstructure of plasma-based ion implantation carbonitrided layer on M50 steel surface
张志豪,李忠文,唐光泽,马欣新
摘要(Abstract):
采用小掠射角X射线衍射(GXRD)、扫描电镜(SEM)、透射电镜(TEM)及纳米压痕仪等研究了M50钢表面等离子体基离子注入(PBII)碳氮共渗层的微观结构及硬度,并对碳氮共渗层的横截面、表面结构以及回火马氏体亚结构进行了分析。结果表明:经过PBII碳氮共渗处理后,随着注渗温度的升高,渗层厚度先增加后降低,渗层中主要含有回火马氏体相、少量Fe_3C和CrN,并在晶粒内部或沿晶界弥散析出化合物颗粒,在400℃PBII处理后,形成了连续的化合物层;注渗后虽然试样的晶界并未消失,但原始的回火马氏体已转变为微晶或微孪晶态;TEM和高分辨透射电镜(HRTEM)分析结果表明,离子注入会导致非晶区的形成以及堆垛缺陷;硬度测试表明,经过PBII处理的试样表面硬度均明显提高,最高硬度达到了21 GPa,比基体硬度高9 GPa。
关键词(KeyWords): M50钢;等离子体基离子注入碳氮共渗;微观结构
基金项目(Foundation): 上海Ⅲ类高峰学科-材料科学与工程
作者(Author): 张志豪,李忠文,唐光泽,马欣新
DOI: 10.13289/j.issn.1009-6264.2025-0104
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