张树玲,武帅政,杨相栋,马兴华,郭峰,张波

• 1:青岛理工大学机械与汽车工程学院
• 2:宁夏大学机械工程学院

摘要(Abstract)：

采用磁控溅射沉积技术在316L不锈钢基体上分别沉积了以TiN和NiN为过渡层的类金刚石(Diamond-like carbon, DLC)涂层。采用扫描电镜、拉曼光谱仪、纳米压痕仪、划痕测试仪和摩擦磨损试验机分析了DLC涂层的表面质量、组织结构和摩擦磨损性能。结果表明：NiN/DLC涂层表面颗粒及孔洞等沉积缺陷数量多，Ni和N共同沉积作为中间过渡层时，Ni多以金属单质的形式存在于DLC和基体之间，而由于金属基体结构及Ni的存在，提高了基体和过渡层间的界面匹配性，使得NiN/DLC涂层膜基结合强度高，接合力达到14.91 N;但Ti与N共同沉积作为过渡层时，Ti和C结合形成金属碳化物存在于DLC和基体之间，这有利于涂层密度(1.929 g/cm~3)和硬度的提高；而且高硬度金属碳化物的形成也有利于涂层变形能力的改善，并利于DLC结构的非晶化及促进sp~3-C键的形成。磨擦磨损分析则表明，无论是在干摩擦、去离子水中还是弱酸(pH=5.6的HCl溶液)工况下，NiN/DLC涂层由于硬度低、组织密度低导致涂层的抗摩擦磨损能力和耐腐蚀能力差；而TiN/DLC涂层具有更低的磨擦系数和磨损量，耐磨、抗磨和耐蚀性能优异。以上实验分析说明具有更高硬度的Ti的氮化物和碳化物作为过渡层能够更好地改善DLC涂层结构和摩擦磨损性能，而Ni为过渡层能够有效提高NiN/DLC涂层的膜基结合强度，但涂层磨擦过程中容易脱落失效。

关键词(KeyWords)： 类金刚石涂层;摩擦系数;硬度;结合力;磨损量

Abstract:

Keywords:

基金项目(Foundation): 国家自然科学基金(52375189)

作者(Author): 张树玲,武帅政,杨相栋,马兴华,郭峰,张波

DOI: 10.13289/j.issn.1009-6264.2024-0243

参考文献(References)：

• [1] 钟强，钱炯，吴静娜，等.表面处理对海洋工程用316L不锈钢耐点蚀性能的影响[J].中国冶金，2022,32(6):129-133.ZHONG Qiang,QIAN Jiong,WU Jing-na,et al.Effect of surface treatment on pitting corrosion resistance of 316L stainless steel for offshore engineering[J].China Metallurgy,2022,32(6):129-133.
• [2] Radi P A,Vieira L,Leite P,et al.Tribocorrosion studies on DLC films with silver nanoparticles for prosthesis applications[J].Surface Topography-Metrology and Properties,2024,12(1):015019.
• [3] Tillmann W,Dias N,Stangier D,et al.Coatability of diamond-like carbon on 316L stainless steel printed by binder jetting[J].Additive Manufacturing,2021,44:102064.
• [4] Cui C Q,Yang C Y.Enhanced wear and corrosion resistance of AZ91 magnesium alloy via adherent Si-DLC coating with Si-interlayer:Impact of biasing voltage[J].Coatings,2024,14(3):341.
• [5] Carvlho I,Rodrigues L,Lima M J,et al.Overview on the antimicrobial activity and biocompatibility of sputtered carbon-based coatings[J].Processes,2021,9:1428.
• [6] Zhou Y,Li L,Chen Z,et al.Accidental damaged diamond-like carbon coating by prefabricated scratches:Experimental exploration on anticorrosion and tribological performances[J].Diamond and Related Materials,2020,111(1):108181.
• [7] Feng L M,Hu J N,Yan S,et al.Effect of high-speed steel surface nitriding treatment on adhesion and wear resistance properties of nitrogen-doped diamond-like carbon coatings[J].Diamond and Related Materials,2023,136:110006.
• [8] Zhang S L,Wu S Z,Huang T L,et al.The effects of Ti/Ni doping on the friction and wear properties of DLC coatings[J].Coatings,2023,13(10):1743.
• [9] Zahid R,Masjuki H H,Varman M,et al.Effect of lubricant formulations on the tribological performance of self-mated doped DLC contacts:A review[J].Tribology Letters,2015,58(2):32.
• [10] Ma L,Nemati N,Kim D E,et al.Interface amorphization controls maximum wear resistance of multinanolayer DLC/WC coatings[J].ACS Applied Materias and Interfaces,2024,16(14):18090-18098.
• [11] Song Z C,Liu Y M,Liu Y W,et al.Improving the protective properties of an artificial joint friction couple by using TiN and DLC films[J].Surface and Coatings Technology,2023,472(15):12994.
• [12] Wang L J,Chen H,Liu Y,et al.Interface-dominated deformation mechanisms in Cr/CrN/Cr-DLC multilayer triggered by nanoindentation[J].Materials Science and Engineering A,2023,887(6):145745.
• [13] Wu S,Zhang L,Zhang B,et al.Structure and tribocorrosion properties of ultralubricated (TiAlCrSi)C multicomponent coatings prepared by FCVAD[J].Vacuum,2024,221:112933.
• [14] Kumar A,Mulik R S.Improving tribological behavior of titanium nitride (TiN) hard coatings via zirconium (Zr) or vanadium (V) doping[J].Tribology International,2023,189:108997.
• [15] Li Q Z,Huang T,Yang M,et al.Effects of gradient structure and modulation period of Ta/TaN/Ta(C,N)/Ta-DLC multilayer coatings prepared by HiPIMS[J].Surface and Coatings Technology,2023,459:129406.
• [16] 于鹤龙，张伟，王红美，等.火焰喷涂NiCrBSi涂层的纳米力学性能[J].材料工程，2018,46(2):78-83.YU He-long,ZHANG Wei,WANG Hong-mei,et al.Nano mechanical peoperties of flame sprayed NiCrBSi coating[J].Journal of Materials Engineering,2018,46(2):78-83.
• [17] Skowronski L,Chodun R,Trzcinski M,et al.Optical properties of amorphous carbon thin films fabricated using a high-energy-impulse magnetron-sputtering technique[J].Materials,2023,16(21):7049.
• [18] Zhang S,Zeng X T,Xie H,et al.A phenomenological approach for the Id/Ig ratio and sp3 fraction of magnetron sputtered a-C films[J].Surface and Coatings Technology,2000,123(2/3):256-260.
• [19] Khodayari A,Elmkhah H,Alizadeh M,et al.Modified diamond-like carbon (Cr-DLC) coating applied by PACVD-CAPVD hybrid method:Characterization and evaluation of tribological and corrosion behavior[J].Diamond and Related Materials,2023,136:109968.
• [20] Casiraghi C.Effect of hydrogen on the UV Raman intensities of diamond-like carbon[J].Diamond and Related Materials,2011,20(2):120-122.
• [21] Zhang S D,Jiang G,Yang Y,et al.Annealing effect on microstructure of novel Ti doped DLC multilayer films[J].Coatings,2023,13(5):833.
• [22] 郭佳乐，伊浩，朱力敏，等.基于纳米划痕的熔石英玻璃去除机制与亚表面裂纹研究[J].表面技术，2024,53(16):151-158.GUO Jia-le,YI Hao,ZHU Li-min,et al.Material removal mechanism and sub-surface cracking in quartz glass based on nanoscratch[J].Surface Technology,2024,53(16):151-158.
• [23] 武帅政，张树玲，黄腾龙，等.厚类金刚石膜研究进展[J].热加工工艺，2023,52(10):14-19.WU Shuai-zheng,ZHANG Shu-ling,HUANG Teng-long,et al.Research progress of thick diamond-like carbon coating[J].Hot Working Technology,2023,52(10):14-19.
• [24] Wang L J,Chen H,Zhang Z L,et al.Atomic insights on nanoindentation-induced plastic-deformation behavior of tetrahedral amorphous carbon film[J].Surface and Coatings Technology,2023,473:129978.
• [25] 龙伟民，刘大双，吴爱萍，等.金刚石粒度及添加量对大气环境感应钎涂层耐磨性的影响[J].机械工程学报，2023,59(12):225-235.LONG Wei-min,LIU Da-shuang,WU Ai-ping,et al.Influence of size and content on the wear resistance of induction brazing diamond coating in air[J].Journal of Mechanical Engineering,2023,59(12):225-235.
• [26] Caschera D,Federici F,Pandolfi L,et al.Effect of composition on mechanical behaviour of diamond-like carbon coatings modified with titanium[J].Thin Solid Films,2011,519(10):3061-3067.
• [27] Liu Y H,Zhang H,Wang X W,et al.Exploring the key mechanism of superlubricity behavior of DLC film in vacuum environment based on first-principles calculations and molecular dynamics simulation[J].Tribology Letters,2023,71(4):113.
• [28] 李坤，郑嘉懿，杨庆超，等.316L不锈钢应力腐蚀研究进展[J].有色金属材料与工程，2023,44(5):36-46.LI Kun,ZHENG Jia-yi,YANG Qing-chao,et al.Research propress on stress corrosion of 316L stainless steel[J].Nonferrous Metal Materials and Engineering,2023,44(5):36-46.

文章评论(Comment)：