李帅,翟志华,孙海东,邵明昊,姜金龙

• 1:兰州理工大学材料科学与工程学院
• 2:烟台先进材料与绿色制造山东省实验室

摘要(Abstract)：

采用多弧离子镀技术,在316L不锈钢基底上制备了CrNx薄膜。通过正交试验法分析了工艺参数对薄膜微观结构和性能的影响。结果表明:各工艺因素影响CrNx薄膜的表面液滴数量、耐腐蚀性和界面接触电阻的重要性分别为:靶电流>基体偏压>沉积气压;基体偏压>靶电流>沉积气压;靶电流>沉积气压>基体偏压。综合考虑,靶电流为80A、基体偏压为50V、沉积气压为3.5Pa的参数组合为最优工艺。经最优工艺制备的CrNx薄膜由Cr、Cr_2N与CrN相组成,其表面液滴粒径较小,表现出优良的耐腐蚀性,腐蚀电流密度仅为0.574μA·cm~(-2),同时具有较低的界面接触电阻,为9.68mΩ·cm~2。

关键词(KeyWords)： 金属双极板;CrNx;金属液滴;耐腐蚀性能;导电性

Abstract:

Keywords:

基金项目(Foundation): 山东省重点研发计划(SYS202203)

作者(Author): 李帅,翟志华,孙海东,邵明昊,姜金龙

DOI: 10.13289/j.issn.1009-6264.2024-0125

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