林晓娉,何丽静,张建军,王晓东,王铁宝

• 1:河北工业大学材料科学与工程学院

摘要(Abstract)：

采用离子束溅射方法在单晶Si(100)基片上沉积厚度为100nm的Al2O3薄膜,利用原子力显微镜、X射线光电子能谱、掠入射衍射等微观分析手段,研究了薄膜的表面形貌、粗糙度、成分,及退火后微观结构的变化。研究表明:室温沉积在基片上的纳米薄膜为非晶态,纳米颗粒为无方向性沉积,颗粒呈团球状,其成分基本满足Al2O3的标准成分配比。850℃×6h退火处理后,生成晶态的-γAl2O3,薄膜表面结晶完整,颗粒清晰可见。

关键词(KeyWords)： 纳米薄膜;离子束沉积;掠入射衍射;退火

Abstract:

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基金项目(Foundation):

作者(Author): 林晓娉,何丽静,张建军,王晓东,王铁宝

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