张翔,蒋百灵,杨超,胡鹏飞

• 1:西安理工大学材料科学与工程学院

摘要(Abstract)：

采用磁控溅射技术在高速钢和单晶硅基体制备了不同碳含量的CrTiAlCN复合镀层,利用XRD、XPS、SEM分析了镀层的相结构、元素存在状态及截面显微形貌,通过销-盘式摩擦磨损试验机研究了镀层的摩擦系数。结果表明,镀层主要由CrN结构的化合物相组成;随着碳含量的增加,镀层中的sp2碳键含量增加,镀层逐渐开始非晶化,镀层更加致密。镀层的摩擦系数随碳含量的增加而下降,当碳含量为50.47 at%时,镀层摩擦系数降至0.1。

关键词(KeyWords)： 碳含量;显微组织;摩擦系数

Abstract:

Keywords:

基金项目(Foundation): 国家高技术研究发展(863)计划(2005AA33H010);; 陕西省国家重点学科培育经费

作者(Author): 张翔,蒋百灵,杨超,胡鹏飞

DOI: 10.13289/j.issn.1009-6264.2011.08.023

参考文献(References)：

• [1]肖继明,李言,白力静,等.CrAlTiN涂层高速钢刀具的切削性能和磨损特性[J].材料热处理学报,2005,26(6):117-121.XIAO Ji-ming,LI Yan,BAI Li-jing,et al.Cutting performance and wear characiteristics of CrTiAliN coated high-speed steel cutting tools[J].Transactions of Materials and Heat Treatment,2005,26(6):117-121.
• [2]白力静,蒋百灵,肖继明,等.CrTIAIN镀层对M2基高速钢切削性能的影响[J].材料研究学报,2006,20(1):54-58.BAI Li-jing,JIANG Bai-ling,XIAO Ji-ming,et al.The influence of CrTIAIN coating on cutting performance of M2 high speed steel[J].ChineseJournal of Materials Research,2006,20(1):54-58.
• [3]林松盛,代明江,侯惠君,等.离子束辅助中频反应溅射(Cr,Ti,Al)N薄膜的研究[J].真空科学与技术学报,2006,26(Z):162-165.LIN Song-sheng,DAI Ming-jiang,HOU Hui-jun,et al.Characterization and growth of(Cr,Ti,Al)N films by ion beam assisted twin-target reactivemagnetron sputtering[J].Chinese Journal of Vacuum Science and Technology,2006,26(Z):162-165.
• [4]Yamamoto K,Sato T,Takahara K,et al.Properties of(Ti,Cr,Al)N coatings with high Al content deposited by new plasma enhanced arc-cathode[J].Surface and Coatings Technology,2003,174-175:620-626.
• [5]周君灵,代明江,林松盛,等.三种不同Cr/Al/Ti元素比例的电弧离子镀(Cr,Al,Ti)N膜耐高温氧化性能的比较[J].模具工程,2008(1):58-61.ZHOU Jun-ling,DAI Ming-jiang,LIN Song-sheng,et al.Comparing of cathodic arc ion deposit(Cr,Al,Ti)N in high-temperature oxidation resistanceproperty with three different Cr/Al/Ti proportions[J].Mould&Die Project,2008(1):58-61.
• [6]黄鹤,何家文.刀具的抗磨和减摩镀层[J].机械工程学报,2002,38(4):155-158.HUANG He,HE Jia-wen.Hard with low-friction coating layers for cutting tools[J].Chinese Journal of Mechanical Engineering,2002,38(4):155-158.
• [7]Stallard J,Mercs D,Jarratt M,et al.A study of the tribological behaviour of three carbon-based coatings,tested in air,water and oil environments athigh loads[J].Surface and Coatings Technology,2004,177-178:545-551.
• [8]胡赓祥,蔡珣.材料科学基础[M].上海:上海交通大学出版社,2000:37-39.
• [9]Camino D,Jones A H S,Mercs D,et al.High performance sputtered carbon coatings for wear resistant applications[J].Vacuum,1999,52:125-151.
• [10]Lacerda R G,Marques F C.Hard hydrogenated carbon coatings with low stress[J].Appl Phys Lett,1998,73:617-625.

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