网状阴极法在碳钢表面沉积氮化钽薄膜的研究Study of TaN Film Synthesized in Carbon Steel Substrate by the Net-Shape Cathode Sputtering Method
窦瑞芬,田林海,潘俊德,陈飞,赵晋香
摘要(Abstract)：
介绍了一种在钢铁基体上制备氮化钽薄膜的新方法———网状阴极法。其设备简单、价格低廉。实验中发现 ,在工艺参数调配合适的条件下 ,可制备出结构为面心立方和密排六方结构的氮化钽薄膜。薄膜较致密且均匀 ,与基体结合良好。分析了优选工艺参数条件下合成的氮化钽膜的成分、组织、表面和断口形貌及结合力。
关键词(KeyWords)： 网状阴极溅射;空心阴极效应;氮化钽薄膜
基金项目(Foundation): 山西省青年基金资助项目 (991 0 2 0 )
作者(Author): 窦瑞芬,田林海,潘俊德,陈飞,赵晋香
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