自支撑金刚石膜的生长特征对断裂强度的影响Effect of growth characteristics on fracture strength of free-standing diamond films
陈良贤,李成明,陈飞,刘政,黑立富,宋建华,陈广超,唐伟忠,吕反修
摘要(Abstract)：
研究了自支撑今刚石膜的生长取向特征、表面形貌和质量对断裂强度的影响。X射线衍射和断裂强度的结果表明,随着衍射强度比值I(111)/I(220)的增大,断裂强度呈下降趋势。堆积在晶粒间界处的二次形核生长的小晶粒,覆盖晶粒间界的缝隙,在柱状晶粒间形成类似的搭桥效应,增强柱状晶之间的相互作用能,提高柱状晶结构的抗破断能力,金刚石膜中出现的非金刚石相将降低金刚石厚膜的断裂强度。
关键词(KeyWords)： 金刚石自支撑膜;生长特征;断裂强度
基金项目(Foundation): 国家自然科学基金项目(50471090,50572007)
作者(Author): 陈良贤,李成明,陈飞,刘政,黑立富,宋建华,陈广超,唐伟忠,吕反修
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