阴极离子镀TiN涂层组织结构与结合强度Structure and bonding strength of Ti N coatings by cathode ion plating
郭皓元,孔德军,王文昌
摘要(Abstract):
采用阴极离子镀方法在YT14硬质合金刀具表面制备了Ti N涂层,通过SEM、EDS和XPS等手段对涂层表面-界面形貌、界面化学元素线扫描和元素价态进行了分析,并用划痕法定量表征其界面层结合强度。结果表明,涂层呈细小致密结构,与基体紧密结合,未观察到裂纹现象;基体表面C原子以间隙扩散和空位扩散方式进入Ti N涂层中,O原子占领或替代Ti N涂层中N原子,形成结合较强的Ti-O键以及Ti-O-N化合物,验证了Ti原子和O原子具有很强的亲和力;涂层-基体界面为化合和扩散结合形式,其结合强度为40.95 N,有利于提高硬质合金刀具的使用寿命。
关键词(KeyWords): 阴极离子镀;硬质合金刀具;Ti N涂层;XPS分析;结合强度
基金项目(Foundation): 江苏省科技支撑计划(工业)(BE2012066);; 中国学位与研究生教育学会研究课题(C1-2013Y07-051)
作者(Author): 郭皓元,孔德军,王文昌
DOI: 10.13289/j.issn.1009-6264.2015.01.032
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