Al2O3/Au/Al2O3层状阻氚薄膜Al2O3/Au/Al2O3 layered films as tritium permeation barrier
汤波楷,何业东,曹江利,唐涛,饶咏初
摘要(Abstract)：
采用磁控溅射法在316L不锈钢基体上分别沉积单层Al2O3膜、单层Au膜以及Al2O3/Au/Al2O3层状薄膜。采用气相渗透法在500℃,氘分压为0.06 MPa条件下测试了薄膜的阻氘性能。结果表明,3种薄膜氘渗透后,薄膜的形貌良好,无开裂、无剥落的现象,氘渗透率减低因子均比316L不锈钢基材增大一个数量级以上,阻氘效能按单层Al2O3膜、单层Au膜以及Al2O3/Au/Al2O3层状薄膜依次递升。Al2O3/Au/Al2O3层状薄膜的优异阻氘效能可归因于,延性的Au夹层使层状薄膜的力学性能得到显著提高;Al2O3层能阻止Au与基体间互扩散,使Au能充分发挥阻氘效能。本研究表明,由贵金属与陶瓷阻氚材料构成的层状薄膜是发展阻氚涂层的新途径。
关键词(KeyWords)： 金;氘渗透;阻氚涂层;渗透率减低因子
基金项目(Foundation): 国际热核聚变实验堆(ITER)计划专项(2010GB112001);; 北京市自然科学基金(2092020)
作者(Author): 汤波楷,何业东,曹江利,唐涛,饶咏初
DOI: 10.13289/j.issn.1009-6264.2012.07.004
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