活性屏离子渗氮技术中偏压电源伏安特性Voltage-current characteristic of bias in active screen plasma nitriding
蓝跃龙,王宇,郑少梅,赵程
摘要(Abstract):
研究了活性屏离子渗氮技术中,气体成分、主电压、温度、压强以及笼子尺寸对偏压伏安特性曲线的影响,并用气体放电理论对曲线做出了解释。实验结果表明,在H2或N2/H2气氛中,偏压的伏安特性曲线呈线性增长;而在纯N2气氛中,偏压的伏安特性曲线则呈非线性,并在250 V时出现拐点。研究还发现,在偏压一定的情况下,偏流会随着主电压和气压的升高而增大,随着温度的升高而减小,而笼子尺寸对偏压的伏安特性曲线的影响比较小。
关键词(KeyWords): 活性屏离子渗氮;主电压;偏压伏安特性
基金项目(Foundation): 山东省自然科学基金项目(ZR2010EM018);;
作者(Author): 蓝跃龙,王宇,郑少梅,赵程
DOI: 10.13289/j.issn.1009-6264.2012.02.030
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