PCrNi3Mo钢表面磁控溅射CrN涂层工艺优化及性能Process optimization and properties of CrN coating on PCrNi3Mo steel by magnetron sputtering
金浩,李德元,郭策安,张罡
摘要(Abstract):
采用磁控溅射技术在PCrNi3Mo钢表面沉积了CrN涂层。利用激光共聚焦显微镜、扫描电镜(SEM)、纳米压痕仪、X射线衍射仪(XRD)对涂层的形貌、硬度与弹性模量和相结构进行了表征,研究了基体负偏压、溅射电流和N2/Ar流量比对溅射涂层结构和力学性能的影响。结果表明:在基体负偏压为100 V、溅射电流为0.2 A、N2/Ar流量比为1时溅射的CrN涂层质量最佳,其硬度和弹性模量分别为21.38 GPa和272.71 GPa,较PCrNi3Mo钢基体的硬度(5.57 GPa)与弹性模量(258 GPa)明显提高。
关键词(KeyWords): 火炮身管;磁控溅射;CrN涂层;力学性能
基金项目(Foundation): 沈阳理工大学重点实验室开放基金(4771004kfs42)
作者(Author): 金浩,李德元,郭策安,张罡
DOI: 10.13289/j.issn.1009-6264.2017-0432
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