王金磊,朱丽慧,边媛媛

• 1:上海大学材料科学与工程学院

摘要(Abstract)：

采用化学气相沉积(CVD)技术在硬质合金表面沉积TiN/MT-TiCN/Al_2O_3/ZrCN多层涂层,并对其进行微喷砂处理。采用扫描电镜(SEM)表征涂层的组织结构,利用显微硬度计、纳米压痕仪、划痕测试仪和往复式摩擦磨损实验机(UMT-3)测试涂层的硬度、结合强度和摩擦磨损性能,并与TiN/MT-TiCN/Al_2O_3/TiOCN涂层进行比较。结果表明:TiN/MT-TiCN/Al_2O_3/ZrCN涂层的磨损机理主要包括磨粒磨损、粘着磨损、氧化磨损和疲劳磨损。相比于摩擦1 h, TiN/MT-TiCN/Al_2O_3/ZrCN涂层摩擦2 h,剥落增多,且磨粒磨损、粘着磨损和疲劳磨损加剧,磨损率增加了33.3%;摩擦3 h,涂层磨粒磨损、粘着磨损和疲劳磨损进一步加剧,但剥落减轻,磨损率较摩擦2 h略有降低。摩擦1 h, TiN/MT-TiCN/Al_2O_3/ZrCN涂层的摩擦系数(0.33)比TiN/MT-TiCN/Al_2O_3/TiOCN涂层(0.39)低;尽管TiN/MT-TiCN/Al_2O_3/ZrCN涂层韧性好,疲劳磨损较轻,但磨粒磨损严重,且存在明显剥落,磨损率高,耐磨性较差。

关键词(KeyWords)： CVD;ZrCN;多层涂层;力学性能;摩擦磨损性能

Abstract:

Keywords:

基金项目(Foundation): 国家重点研发计划(2016YFB0300403);; 美国kennametal公司资助项目

作者(Author): 王金磊,朱丽慧,边媛媛

DOI: 10.13289/j.issn.1009-6264.2021-0241

参考文献(References)：

• [1] 陈响明.硬质合金刀具TiN/TiCN/Al2O3/TiN多层复合涂层制备与组织性能研究[D].长沙：中南大学，2012.CHEN Xiang-ming.Preparation and microstructure properties of TiN/TiCN/Al2O3/TiN multilayer composite coatings for carbide cutting tools[D].Changsha:Central South University,2012.
• [2] You Q B,Xiong J,Guo Z X,et al.Microstructure and properties of CVD coated on Ti(C,N)-based cermets with varying WC additions[J].International Journal of Refractory Metals and Hard Materials,2019,81:299-306.
• [3] Sahoo A K,Sahoo B.Performance studies of multilayer hard surface coatings (TiN/TiCN/Al2O3/TiN) of indexable carbide inserts in hard machining:Part-I (An experimental approach)[J].Measurement,2013,46(8):2854-2867.
• [4] 刘庆露，朱丽慧，刘振宇.微喷砂处理对TiN/MT-TiCN/Al2O3/TiOCN多层涂层摩擦磨损性能的影响[J].表面技术，2019,48(7):371-377.LIU Qing-lu,ZHU Li-hui,LIU Zhen-yu.Effect of microblasting post-treatment on the friction and wear properties of TiN/MT-TiCN/Al2O3/TiOCN multilayer coatings[J].Surface Technology,2019,48(7):371-377.
• [5] 沈同威.TiN/TiCN/Al2O3/TiN和TiN/TiCN/Al2O3/TiCNO多层涂层的组织和性能研究[D].上海：上海大学，2020.SHEN Tong-wei.The research of microstructure and properties of TiN/TiCN/Al2O3/TiN and TiN/TiCN/Al2O3/TiCNO multilayer coatings[D].Shanghai:Shanghai University,2020.
• [6] 刘庆露.CVD制备TiN/MT-TiCN/Al2O3/TiOCN多层涂层组织与性能的研究[D].上海：上海大学，2019.LIU Qing-lu.The research of microstructure and properties of TiN/MT-TiCN/Al2O3/TiOCN multilayer coatings[D].Shanghai:Shanghai University,2019.
• [7] 沈同威，朱丽慧.TiN/TiCN/Al2O3/TiN与TiN/TiCN/Al2O3/TiCNO多层涂层的组织性能比较[J].表面技术，2020,49(7):141-148.SHEN Tong-wei,ZHU Li-hui.Comparison of microstructure and properties between TiN/TiCN/Al2O3/TiN and TiN/TiCN/Al2O3/TiCNO multilayer coatings[J].Surface Technology,2020,49(7):141-148.
• [8] 喻利花，马冰洋，许俊华.C含量对ZrCN薄膜结构和力学性能的影响[J].金属学报，2012,48(4):469-474.YU Li-hua,MA Bing-yang,XU Jun-hua.Influence of C content on structure and mechanical properties of ZrCN composite films[J].Acta Metallurgica Sinica,2012,48(4):469-474.
• [9] Yao S H,Su Y L,Kao W H.Wear behavior of DC unbalanced magnetron sputter deposited ZrCN films[J].Materials Letters,2005,59(26):3230-3233.
• [10] 张冬冬，史昆玉，汤皓晨.TC4 钛合金表面沉积TiCN 涂层及其耐磨耐腐蚀性能研究[J].表面技术，2020,49(6):297-304.ZHANG Dong-dong,SHI Kun-yu,TANG Hao-chen.TiCN coating deposited on TC4 titanium alloy and its wear and corrosion resistance[J].Surface Technology,2020,49(6):297-304.
• [11] Kudapa S,Narasimhan K,Boppana P,et al.Characterization and properties of MTCVD TiCN and MTCVD ZrCN coatings[J].Surface and Coatings Technology,1999,120-121:259-264.
• [12] Sahoo A K,Sahoo B.Experimental investigations on machinability aspects in finish hard turning of AISI 4340 steel using uncoated and multilayer coated carbide inserts[J].Measurement,2012,45:2153-2165.
• [13] Thakur A,Gangopadhyay S,Mohanty A,et al.Experimental assessment on performance of TiN/TiCN/Al2O3/ZrCN coated tool during dry machining of Nimonic C-263[J].International Journal of Machining and Machinability of Materials,2016,18(5/6):452-465.
• [14] 张星.纳米压痕法表征316L不锈钢表面等离子合金化层的力学性能[D].太原：太原理工大学，2013.ZHANG Xing.Nanoindentation characterization of mechanical properties for plasma alloying coating on 316L stainless steel[D].Taiyuan:Taiyuan University of Technology,2013.
• [15] Oliver W C,Pharr G M.An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments[J].Journal of Materials Research,1992,7(6):1564-1583.
• [16] 宋贵宏，杜昊，贺春林.硬质与超硬涂层：结构、性能、制备与表征[M].北京：化学工业出版社，2007.
• [17] EN ISO 20502-2016.Fine ceramics (advanced ceramics,advanced technical ceramics)-Determination of adhesion of ceramic coatings by scratch testing[S].Britain,2016.
• [18] Shen T W,Zhu L H,Liu Z Y.Effect of micro-blasting on the tribological properties of TiN/MT-TiCN/Al2O3/TiCNO coatings deposited by CVD[J].International Journal of Refractory Metals and Hard Materials,2020,88:105205.
• [19] Gong W J,Chen Y X,Li M W,et al.Adhesion-fatigue dual mode wear model for fractal surfaces in AISI 1045 cylinder-plane contact pairs[J].Wear,2019,430-431:327-339.

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