王敏,李文芳,张果戈

• 1:广东技术师范学院机电学院
• 2:华南理工大学材料科学与工程学院

摘要(Abstract)：

以0.2 mol/L Sr(OH)2+0.2 mol/L NaOH溶液为电解液,工艺参数分别设置为电流密度2 A/cm2、电流频率100 Hz、反应时间30 min及占空比85%,采用微弧氧化法在工业纯Ti板(99.5%)表面原位生长SrTiO3薄膜,并对薄膜的物相组成,元素分布情况及薄膜介电、铁电性能进行表征。结果表明:所得薄膜主要由四方相SrTiO3构成。薄膜介电常数随频率升高而降低,其在1 kHz条件下的介电常数为317。薄膜中除Sr、Ti、O元素外,还存在Na元素,且Na元素在薄膜与基体结合处出现富集,元素分布的微小波动可能是由微弧氧化孔洞造成。

关键词(KeyWords)： 微弧氧化;SrTiO3;铁电薄膜;介电性能

Abstract:

Keywords:

基金项目(Foundation): 广东省自然科学基金资助项目(S2013010015211);; 中央高校基本科研业务费专项资金资助项目(2012ZZ0011)

作者(Author): 王敏,李文芳,张果戈

DOI: 10.13289/j.issn.1009-6264.2014.06.032

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