铝合金等离子体基离子注入氮/钛结构及摩擦学特性The Structure and Tribological Characteristic for Aluminum Alloy Implanted with N/Ti by PBII
廖家轩,夏立芳,孙跃
摘要(Abstract)：
通过X射线光电子能谱 (XPS)和小掠射角X射线衍射 (GXRD)分析测定了铝合金LY12等离子体基离子注入氮再注入钛的改性层成分分布及相组成。测量了纳米硬度 ,进行了摩擦磨损试验及磨痕形貌观察。讨论了磁控靶溅射电流 40mA、40 0mA对改性层结构和摩擦学性能的影响。结果表明 ,氮在注入层呈高斯分布 ,钛沿注入方向逐渐减少 ,钛的注入使氮的分布展宽 ,在 40 0mA下注钛有钛的沉积层出现。和LY12相比 ,摩擦学性能显著提高 ,粘着磨损程度显著减轻 ,40 0mA下改善幅度更大 ,形成TiO2 、TiN、TiAl3、Al2 O3、AlN或Ti相是主要原因
关键词(KeyWords)： 铝合金;等离子体基离子注入(PBII);纳米硬度;摩擦学;粘着磨损
基金项目(Foundation): 国家自然科学基金资助 !(59771 0 59)
作者(Author): 廖家轩,夏立芳,孙跃
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