周贤界,许积文,魏秋平,王继民,余志明

• 1:中南大学材料科学与工程学院
• 2:桂林电子科技大学材料科学与工程学院
• 3:广东省科学院

摘要(Abstract)：

分别用化学共沉淀粉和单元氧化物混合粉为原料烧结制备In_2Ga_2ZnO_7(IGZO)靶材,对比研究了煅烧温度、烧结温度、烧结气氛、保温对靶材烧结致密度和微观结构的影响。结果表明,混合粉比共沉淀粉更容易促进烧结致密化,但通过选择合适的煅烧温度和烧结工艺,两种原料粉均可获得密度高于99.5%的IGZO靶材。靶材烧成前1100℃保温效果最好,最佳烧成温度区间为1400~1450℃。共沉淀粉优选煅烧温区为900~1050℃,烧结时对氧气气氛更敏感;混合粉优选煅烧温区为750~900℃,且在氧气气氛下烧结优于空气。此外,共沉淀粉烧结体晶粒均匀分布、晶界清晰,而混合粉的烧结体表面晶界模糊,呈"网格状"和"层状"形貌。

关键词(KeyWords)： IGZO靶材;共沉淀;球磨混合;烧结工艺;致密化

Abstract:

Keywords:

基金项目(Foundation): 广西信息材料重点实验室自由探索基金(1210908-204-Z,1110908-05-K)

作者(Author): 周贤界,许积文,魏秋平,王继民,余志明

DOI: 10.13289/j.issn.1009-6264.2017-0064

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