齐晓霞,许并社,翟光美,梁建,马淑芳

• 1:太原理工大学新材料界面科学与工程教育部重点实验室
• 2:中北大学理学院
• 3:太原理工大学材料科学与工程学院

摘要(Abstract)：

用化学气相沉积法(CVD)通过碳热还原反应在Si(100)衬底上以Ag纳米颗粒为催化剂制备了糖葫芦状的SiC纳米棒。硅源为溶胶凝胶制备的SiO_2,碳源为炭粉。采用X射线分析衍射仪(XRD)、扫描电镜(SEM)、透射电镜(TEM)、高分辨率透射电镜(HRTEM)、荧光光谱(PL)对产物的组成、形貌、微观结构等进行了表征。结果表明,SiC纳米棒都其有周期性的凹凸,形状貌似糖葫芦状,长度范围为300~600 nm,而直径为30~50 nm。纳米结构生长机制为VLS生长模式,其中Ag催化剂对其形貌起到至关重要的影响。室温下SiC纳米棒的PL发光峰与块体SiC的发光特征峰相比有蓝移。

关键词(KeyWords)： SiC纳米棒;溶胶凝胶法;显微结构;Ag催化机理

Abstract:

Keywords:

基金项目(Foundation): 国家自然科学基金(61475110,21471111,61404089,61504090);; 山西省科技创新重点团队(2012041011);; 山西省基础研究项目(2014011016-6,2014021019-1,2015021103);; 电子薄膜与集成器件国家重点实验室开放课题(KFJJ201406)

作者(Author): 齐晓霞,许并社,翟光美,梁建,马淑芳

DOI: 10.13289/j.issn.1009-6264.2016.07.001

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