占勤,刘城淋,杨洪广

• 1:中国原子能科学研究院

摘要(Abstract)：

为提高中子管或中子发生器氚靶钛钼合金膜的吸氘性能,创新的采用钛靶和钼靶双靶磁控溅射方式在钼基片上循环沉积钛膜和钼膜,利用钛钼之间的注入与热扩散得到多层钛钼合金膜,利用辉光放电光谱仪(GDOES)研究了热扩散对多层(5层及10层)钛钼合金膜元素分布的影响。结果表明,500℃加热对合金膜中钛钼元素的均匀化扩散作用不明显,通过增大循环次数,减少每次循环各靶溅射时间,可有效提高合金膜的钛钼扩散程度。镀膜沉积循环次数由5次增加至10次,单次钛靶溅射时间由60 min降低至30 min,钼靶溅射时间由5 min降低至2 min,得到的合金膜钼元素含量峰值从39.5 at%降至8.24 at%,450℃下吸氘平衡时间从15 min降至6 min,平均氘钛比从1.05升至1.85。改进工艺后的钛钼合金膜,有效提高了合金膜的钛钼扩散程度及其吸氘性。

关键词(KeyWords)： 磁控溅射;钛钼合金膜;吸氘性能;辉光放电光谱

Abstract:

Keywords:

基金项目(Foundation): 科技部中子管项目(2017YFF0104201);; 中核集团自主研发项目

作者(Author): 占勤,刘城淋,杨洪广

DOI: 10.13289/j.issn.1009-6264.2020-0189

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