赵静,胡斌,王天鹏,张淮浩

• 1:扬州大学化学化工学院

摘要(Abstract)：

用溶胶—凝胶法在腐蚀箔表面引入了TiO_2阀金属氧化物,随后在硼酸铵溶液中进行化成处理,获得了高介电常数的Al_2O_3-TiO_2复合介电膜层。以扫描电镜SEM、EDS能谱以及XRD能谱分析了氧化膜的表面及截面形貌、Ti元素的分布以及氧化膜的晶相。结果表明,经过550℃热处理后,锐钛矿型TiO_2已成功获得。随着涂Ti量的增加,腐蚀箔蚀孔孔径减小且被堵塞的几率变大,更易形成涂层缺陷。此外,氧化膜的升压曲线以及交流阻抗曲线的分析结果表明,当腐蚀箔表面涂Ti量为4.4 mg·cm~(-2)时,化成阶段消耗的形成电量最小,相对无Ti腐蚀箔减少了85.0%,与之对应的化成箔的比电容达到最大值(54.16μF·cm~(-2)),相对无Ti化成箔比电容增加了25.8%。

关键词(KeyWords)： 溶胶—凝胶法;复合介电膜层;比电容

Abstract:

Keywords:

基金项目(Foundation): 中国博士后国家科学基金(2014M551668);; 扬州市科技项目(YZ2014042);; 研究生创新计划项目SJLX15-0669)

作者(Author): 赵静,胡斌,王天鹏,张淮浩

DOI: 10.13289/j.issn.1009-6264.2017-0026

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