于翔,王成彪,刘阳,于德洋

• 1:中国地质大学(北京)工程技术学院
• 2:中国地质大学(北京)工程技术学院
• 3:北京实力源科技有限公司
• 4:北京实力源科技有限公司 北京100083

摘要(Abstract)：

利用新型中频对靶磁控溅射在硅和M2高速钢基体上沉积了一系列无氢含铬类金刚石膜。考察了类金刚石膜的表面形貌、显微结构、硬度、结合力和摩擦磨损性能。结果表明:合成的类金刚石薄膜具有优良的综合性能,硬度为30-46GPa、结合力Lc达50-65N、大气环境下摩擦系数约为0.1。

关键词(KeyWords)： 含铬类金刚石薄膜;中频对靶磁控溅射;多层梯度结构

Abstract:

Keywords:

基金项目(Foundation): 国家自然科学基金资助项目(50475057);; 清华大学摩擦学国家重点实验室开放基金资助项目

作者(Author): 于翔,王成彪,刘阳,于德洋

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