李夕金,张大蔚,薛文斌

• 1:河南大学物理与电子学院
• 2:北京师范大学核科学与技术学院

摘要(Abstract)：

在TiAl合金表面以等离子液相沉积方法制备了Al2O3膜。扫描电镜观察膜为多孔结构,沉积膜的内部孔的直径约30μm,表面孔的直径约有10μm;多孔结构的膜硬度约为1200 HV;沉积膜的主要相成分是γ-Al2O3及少量的α-Al2O3;显微划痕实验结果表明膜层与基体之间有较好的结合力,划痕超声信号出现在15 N压力附近;利用SEM及EDS能谱分析膜层破裂机制,膜层的开裂主要是由于基体在压力作用下的变形导致。

关键词(KeyWords)： Al2O3膜;等离子液相沉积;性能;TiAl合金

Abstract:

Keywords:

基金项目(Foundation): 国家自然科学基金(51372069)

作者(Author): 李夕金,张大蔚,薛文斌

DOI: 10.13289/j.issn.1009-6264.2015.03.026

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