朱宇杰,马景灵,王广欣,秦聪慧,Heinz Rolf Stock

• 1:河南科技大学材料与工程学院
• 2:河南科技大学高纯材料研究中心

摘要(Abstract)：

用高能脉冲靶和双极脉冲靶共溅射的方式,采用高功率脉冲磁控溅射技术(HIPIMS)在高速钢基片(W18Cr4V)上制备了CrN涂层和CrAlN涂层((H+B)CrN、(H+B)CrAlN);同时采用第四代电弧离子镀技术(ARC evaporators)在高速钢基片上制备了CrN涂层和CrAlN涂层(ARC CrN、ARC CrAlN)。采用划痕试验、X射线衍射、扫描电镜和电化学腐蚀测试等研究了涂层的形貌和性能。结果表明:共溅射制备的涂层膜基结合力更强,临界载荷最高可达到72.2 N,表面晶粒更细小,缺陷少,横截面组织致密;同时该方法制备的CrAlN((H+B)CrAlN)涂层的高温抗氧化性能最佳;共溅射制备的涂层的耐腐蚀性能比电弧离子镀制备的涂层更好。

关键词(KeyWords)： 高功率脉冲磁控溅射技术(HIPIMS);共溅射;CrN;CrAlN;膜基结合力;耐腐蚀性

Abstract:

Keywords:

基金项目(Foundation): 河南省自然科学基金培育项目(162300410087)

作者(Author): 朱宇杰,马景灵,王广欣,秦聪慧,Heinz Rolf Stock

DOI: 10.13289/j.issn.1009-6264.2018-0480

参考文献(References)：

• [1] 刘彦茗,杜劲,王立国.PVD涂层刀具及其寿命研究进展[J].工具技术,2018,52(1):3-7.LIU Yan-ming,DU Jin,WANG Li-guo.Overview of PVD coating tool and its life[J].Tool Engineering,2018,52(1):3-7.
• [2] Subramanian B,Muraleedharan C V,Ananthakumar R,et al.A comparative study of titanium nitride (TiN),titanium oxy nitride (TiON) and titanium aluminum nitride (TiAlN),as surface coatings for bio implants[J].Surface and Coatings Technology,2011,205(21):5014-5020.
• [3] Liu A H,Deng J X,Cui H B,et al.Oxidation resistance of CrN and CrAlN coating tools[J].Advanced Materials Research,2011,189-193.
• [4] Zhang G A,Yan P X,Wang P,et al.Thestructure and tribological behaviors of CrN and Cr-Ti-N coatings[J].Applied Surface Science,2007,253:7353-7359.
• [5] Jin H,Zhang Y Y,Shi Z,et al.Recent developments on magnetron sputtering of CrAlN coating[J].Materials Review,2016,30(2):54-59.
• [6] Ehiasarian A,New R,Munz W D,et al.Influence of high power densities on the composition of pulsed magnetron plasmas[J].Vacuum,2002,65(2):147-154.
• [7] Kouznetsov V,Karol Macák,Schneider J M,et al.A novel pulsed magnetron sputter technique utilizing very high target power densities[J].Surface and Coatings Technology,1999,122(2/3):290-293.
• [8] 王启民,张小波,张世宏,等.高功率脉冲磁控溅射技术沉积硬质涂层研究进展[J].广东工业大学学报,2013(4):1-13.WANG Qi-min,ZHANG Xiao-bo,ZHANG Shi-hong,et al.Progress of high power impulse magnetron sputtering for deposition of hard coatings[J].Journal of Guangdong University of Technology,2013,30(4):1-13.
• [9] Smith R J,Tripp C,Knospe A,et al.Using CrAlN multilayer coatings to improve oxidation resistance of steel interconnects for solid oxide fuel cell stacks[J].Journal of Materials Engineering and Performance,2004,13(3):295-302.
• [10] Polcar T,Kubart T,Novak R,et al.Comparison of tribological behaviour of TiN,TiCN and CrN at elevated temperatures[J].Surface and Coatings Technology,2005,193(1):192-199.
• [11] Bobzin K,Bagcivan N,Immich P,et al.Advantages of nanocomposite coatings deposited by high power pulse magnetron sputtering technology[J].Journal of Materials Processing Technology,2009,209(1):165-170.
• [12] Hovsepian P E,Reinhard C,Ehiasarian A P.CrAlYN/CrN superlattice coatings deposited by the combined high power impulse magnetron sputtering/unbalanced magnetron sputtering technique[J].Surface and Coatings Technology,2006,201(7):4105-4110.
• [13] 吴忠振,田修波,巩春志,等.基片偏压模式对高功率脉冲磁控溅射CrN薄膜结构及成分影响研究[J].稀有金属材料与工程,2013,42(2):405-409.WU Zhong-zhen,TIAN Xiu-bo,GONG Chun-zhi,et al.Effect of bias modes on structures and composition of CrN films prepared by high power pulsed magnetron sputtering[J].Rare Metal Materials and Engineering,2013,42(2):405-409.
• [14] Sarakinos K,Alami J,Konstantinidis S.High power pulsed magnetron sputtering:A review on scientific and engineering state of the art[J].Surface and Coatings Technology,2010,204(11):1661-1684.
• [15] 冯爱新,张永康,谢华琨,等.划痕试验法表征薄膜涂层界面结合强度[J].江苏大学学报:自然科学版,2003,24(2):15-19.FENG Ai-xin,ZHANG Yong-kang,XIE Hua-kun,et al.Characterization of interfacial adhesion and bond strength between thin film coating and substrate by scratch testing[J].Journal of Jiangsu University:Natural Science Edition,2003,24(2):15-19.
• [16] Helmersson U,Lattemann M,Bohlmark J,et al.Ionized physical vapor deposition (IPVD):A review of technology and applications[J].Thin Solid Films,2006,513(1):1-24.
• [17] 李伟洲,李月巧,刘乐林,等.电弧离子镀CrAlN涂层的微观结构及力学性能研究[J].广西大学学报:自然科学版,2010,35(5):865-871.LI Wei-zhou,LI Yue-qiao,LIU Yue-lin,et al.Microstructures and mechanical properties of CrAlN coatings deposited by arc ion plating[J].Journal of Guangxi University:Natural Science Edition,2010,35(5):865-871.
• [18] 张钦英,陈颢,任兴润,等.Al靶溅射功率对CrAlN涂层组织结构及摩擦性能的影响[J].有色金属科学与工程,2017,8(5):109-114.ZHANG Qin-ying,CHEN Hao,REN Xing-run,et al.Effect of Al target sputtering power on themicrostructure and tribological properties of CrAlN coatings[J].Nonferrous Metals Science and Engineering,2017,8(5):109-114.
• [19] 吴忠振,田修波,巩春志,等.基片偏压模式对高功率脉冲磁控溅射CrN薄膜结构及成分影响研究[J].稀有金属材料与工程,2013,42(2):405-409.WU Zhong-zhen,TIAN Xiu-bo,GONG Chun-zhi,et al.Effect of bias modes on structures and composition of CrN films prepared by high power pulsed magnetron sputtering[J].Rare Metal Materials and Engineering,2013,42(2):405-409.
• [20] Guimaraes M C R,Nossa T D S,Avila P R T,et al.On the effect of substrate oscillation on CrN coatings deposited by HiPIMS and dcMS[J].Surface and Coatings Technology,2018,340:112-120.
• [21] 李明升,冯长杰,王福会.电弧离子镀氮化铬涂层的高温氧化[J].稀有金属材料与工程,2007,36(s2):699-702.LI Ming-sheng,FENG Chang-jie,WANG Fu-hui.High-temperature oxidation of chromium nitride coating by arc ion plating[J].Rare Metal Materials and Engineering,2007,36(s2):699-702.
• [22] Kawate M,Hashimoto A K,Suzuki T.Oxidation resistance of Cr1-XAlXN and Ti1-XAlXN films[J].Surface and Coatings Technology,2003,165(2):163-167.
• [23] Duo S W,Zhu M,Liu T Z,et al.Corrosion behaviors of Cr-Al-N coatings deposited by reactive magnetron sputtering[J].Transactions of Nonferrous Metals Society of China,2007,17(s1):841-846.

文章评论(Comment)：