王猛,李成明,陈良贤,刘金龙,郭建超,魏俊俊,黑立富,吕反修

• 1:北京科技大学新材料技术研究所

摘要(Abstract)：

采用射频磁控溅射法在抛光的CVD金刚石膜上制备了立方(222)择优取向的Y2O3薄膜,利用XRD,纳米力学探针,划痕仪,FTIR和TEM等手段研究了退火对Y2O3薄膜的结构、力学性能和红外透过率的影响及Y2O3的微观结构。结果表明:通过退火Y2O3薄膜的结晶程度增加,退火后的择优取向仍为立方相(222)晶面结构;薄膜的硬度降低而弹性模量升高,薄膜与金刚石的结合力增加;薄膜的红外透过率略有降低;薄膜为柱状晶结构并存在大量非晶态。

关键词(KeyWords)： CVD金刚石;Y2O3;退火;力学性能;红外透过

Abstract:

Keywords:

基金项目(Foundation): 国家自然科学基金(51272042);; 教育部博士点基金(2011000110011)

作者(Author): 王猛,李成明,陈良贤,刘金龙,郭建超,魏俊俊,黑立富,吕反修

DOI: 10.13289/j.issn.1009-6264.2014.07.032

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