等离子体基高温离子注入研究进展Progress in Research of Plasma-Based Ion Implantation at Elevated Temperature
孙跃,陈继新,夏立芳,刘鑫贵,徐淑艳
摘要(Abstract):
综述了等离子体基高温离子注入的发展及应用情况 ,介绍了由于高温注入中辐照增强扩散和热扩散的共同作用 ,注入层成分、组织结构、力学性能和抗腐蚀性能随温度提高发生的变化。并对今后的发展趋势作了预测。
关键词(KeyWords): 等离子体基离子注入;升温;扩散;组织和性能
基金项目(Foundation):
作者(Author): 孙跃,陈继新,夏立芳,刘鑫贵,徐淑艳
参考文献(References):
- 1 ConradJR ,etal.Plasmasourceion implantationtechniqueforsurfacemodificationofmaterials[J].JApplPhys,1987,62(11):4591~4596.
- 2 王钧石,陈元儒,白彬.等离子体浸没式注入表面改性[J].金属热处理,1999(11):19~24.
- 3 AA巴巴特札赫里亚宾,ГД库兹涅佐夫著书名[M],何大智译,王雪芬校.北京:国防工业出版社,1988:56~58.
- 4 EnsingerW .Modificationofmechanicalandchemicalsurfacepropertiesofmetalsbyplasmaimmersionionimplantation[J].SurfCoatTechnol,1998,(100101):341~352.
- 5 XiaLifang,etal.ProceedingsoftheAsianConferenceonHeatTreatmentofMaterials.Beijing,ChinaMachinePress,1998,91.
- 6 VahediV ,LiebermanMA ,AlvesMV ,Aone dimensionalcollisionalmodelforplasma immersionionimplantation[J].JApplPhys,1991,69(4):2008.
- 7 BarryPLinder,etal.Plasmaimmersionionimplantationwithdielectricsubstrates[J].IEEETrans.OnPlasmaScience,1996,24(6):1383.
- 8 G櫣nzelR,BrutscherJ.Sheathdynamicsinplasmaimmersionionimplantation[J].SurfCoatTechnol,1996,85:98~104.
- 9 CollinsGA ,ShortKT ,TendysJ .Characterisationofhighvoltagepulserperformanceinradiofrequencyplasmas[J].Surf.Coat.Technol,1997,93:181.
- 10 M ndlS ,etal.Measuredandcalculateddosedistributionfor2Dplasmaimmersionionimplantation[J].SurfCoatTechnol,1997,93:229~233.
- 11 QinShu,ZhouYuanzhong,ChanChung.Two dimensionalmodelingandsimulationfordynamicsheathexpansionduringplasmaimmersionionimplantation[J].IEEETrans.OnPlasmaScience,1999,27(3):766~771.
- 12 EnsingerW ,VolzK .Thinfilmoxidesasprobeforhomogeneitymeasurementsof3 dimensionalobjectstreatedbyplasmaimmersionionimplantation[J].NuclInstrumMeth,2000,166:154~158.
- 13 WolfhardM ler,etal.Plasma immersionionimplantationfordiffusivetreatment[J],SurfCoatTechnol,1999,(116119):1~10.
- 14 XieL ,etal.Influenceoftemperatureonnitrogenionimplantationofincoloyalloys908and909[J].MaterSciEng,1991,(A139):179~184.
- 15 TendysJ,etal.Plasmaimmersionionimplantationusingplasmasgeneratedbyradiofrequencytechniques[J].ApplPhysLett,1988,53(22):2143.
- 16 CollinsGA ,HutchingsR ,TendysJ.Plasmaimmersionionimplantationofsteels[J].MaterSciandEng,1991,(A139):171~178.
- 17 ThorwarthG ,M ndlS ,RauschenbachB .Plasmaimmersionionimplantationofcold worksteel[J].SurfCoatTechnol,2000,(125):94~99.
- 18 M ndlS ,RicherE ,G櫣nzelR,etal.Nitrogenplasmaimmersionionimplantationintohighspeedsteel[J].NuclInstrumMeth,1999,(B148):846.
- 19 MalaczyskiGerardW ,ChiLeungH ,ElmoursiAlaaA ,etal.Characterizationofsurfacemodifiedα ironbynitrogenplasmaimmersionionimplantation:amicrostructuralstudy[J].MaterSciEng,1999,(A262):289~299.
- 20 SamandiM ,SheddenBA ,SmithDI.Microstructure,corrosionandtribologicalbehaviorofplasmaimmersionion implantedausteniticstainlesssteel[J].SurfCoatTechnol,1993,(59):261~266.
- 21 LiX ,SamandiM ,DunneD .Cross sectionaltransmissionelectronmicroscopycharacteriza tionofplasmaimmersionionimplantedausteniticstainlesssteel[J].SurfCoatTechnol,1996,(85):28~36.
- 22 BlawertC ,MordikeBL ,Jir偄skkov偄Y,etal.StructureandcompositionofexpandedausteniteproducedbynitrogenplasmaimmersionionimplantationofstainlesssteelsX6CrNiTi1810andX2CrNiMoN2253[J].SurfCoatTechnol,1999,(116119):189~198.
- 23 BlawertC ,MordikeBL .NitrogenplasmasourceionimplantationforsurfacetreatmentandwearprotectionofausteniticstainlesssteelX6CrNiTi1810[J],SurfCoatTechnol,1999,(116119):352~360.
- 24 BlawertC ,MordikeBL ,Jir偄skkov偄Y,etal.PhaseandmicrostructuralstudyofsurfacelayersproducedbyplasmaimmersionionimplantationofstainlesssteelsX6CrNiTi1810[J].SurfEng,1999,(156):469~475
- 25 Jir偄skov偄Y,etal.Thermalstabilityofstainlesssteelsurfacesmitridedbyplasmaimmersionionimplantation[J].PhysicaStatusSolidi,1999,A172(2):537.
- 26 LiX ,WexlerD ,CalkaA .Microstructuralprecursorsfordecompositionofnitridedstainlesssteel:Acomparisonofplasmaimmersionionimplantation(PI3)andreactiveballmilling[J].MaterSciForum,1999,(312):339~344.
- 27 BlawertC ,etal.,Plasmainmmersionionimplantationofpurealuminumatelevatedtemperatures[J],NuclInstrumMethPhysRes,1997,B 127128,873.
- 28 战再吉.铝合金等离子体基离子体基离子注氮层的组织结构及摩擦学特性[D].哈尔滨工业大学.1999:56~79.
- 29 ZhanZaiji,etal.Tribologicalbehaviorofaluminumalloyssurfacelayerimplantedwithnitrogenionsbyplasmaimmersionionimplantation[J],Wear,1998220:161167.
- 30 战再吉,马欣新,夏立芳.铝合金等离子体淹没离子注入氮层组织及其耐磨性[J].材料研究学报,1998,12(5):546~549.
- 31 战再吉,马欣新,冯莉丽,等.铝合金等离子体淹没氮离子注入层的摩擦学性能研究[J].摩擦学学报,1998,18(4):300~304.
- 32 战再吉,马欣新,冯莉丽,等.等离子体基离子注入氮对铝合金耐磨性的影响[J].金属热处理学报,1998,19(3):7~10.
- 33 MalikShamimM ,etal.OverviewofplasmasourceionimplantationatUniversityofWisconsinMadison[J].JVacSciTechnol,1994,B12(2):843.
- 34 JohnsSM ,BellT ,SamandiM ,etal.WearresistanceofplasmaimmersionionimplantedTi6Al4V[J].SurfCoatTechnol,1996,(85):7~14.
- 35 SeungheeHam,etal.Plasmasourceionimplantationofnitrogen,carbonandoxygenintoTi6Al4Valloy[J].SurfCoatTechnol,1996,(82):270.
- 36 AlonsoF ,etal.CharacterizationofTi6Al4Vmodifiedbynitrogenplasmaimmersionionimplantation[J].SurfCoatTechnol,1997,(93):305.
- 37 WangSY ,etal.Radio frequencyplasmanitridingandnitrogenplasmaimmersionionimplantationofTi6Al4V[J].SurfCoatTechnol,1997,(93):309.
- 38 ShangZK ,etal.PlasmasourceionimplantationprojectatsouthwesterninstituteofPhysics[J].SurfCoatTechnol,1996,85:105~111.
- 39 SeungheeHam,etal.Plasmasourceionimplantationofnitrogen,carbonandoxygenintoTi6Al4Valloy[J].SurfCoatTechnol,1996,(82):270.
- 40 季红兵,夏立芳,马欣新,等.Ti6Al4V合金氮等离子注入层的成分、组织结构及摩擦学特性[J].金属热处理,2000,(2):7~10.
- 41 ChenA ,etal.SurfacemodificationofTi6Al4Vsurgicalalloybyplasmasourceionimplantation[J],SurfCoatTechnol,1991,50:1~8.
- 42 WeiR .Lowenergy,highcurrentdensityionimplantationofmaterialsatelevatedtemperaturesfortribologicalapplications[J].SurfCoatTechnol,1996,(83):218~227.
- 43 BullSJ ,etal.Improvingthemechanicalpropertiesofsteelsusinglowenergy,hightemperaturenitrogenionimplantation[J].SurfCoatTechnol,1996,(83):257.
- 44 JonesAM ,BullSJ .Changingthetribologicalperformanceofsteelsusinglowenergy.hightemperaturenitrogenionimplantation[J].SurfCoatTechnol,1996,(83):269~274.
- 45 LeiMK ,ZhangZL .Plasmasourceionnitriding:Anewlowtemperaturenitridingapproach[J].JVacSciTechnol,1995,A13(6):2986~2990.
- 46 LeiMK ,ZhangZL .Plasmasourceionnitridingofpureiron:formationofanironnitridelayerandhardeneddiffusionlayeratlowtemperature[J].SurfCoatTechnol,1997,(91):25~31.
- 47 LeiMK ,ZhangZL ,MaTC .Plasma basedlow energyionimplantationforlow temperaturesurfaceengineering[J].SurfCoatTechnol,2000,(131):317.
- 48 BlawertC ,MordikeBL .Industrialapplicationsofplasmaimmersionionimplantation[J],SurfCoatTechnol,1997,93:274~279.
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