Chemical Structure of Carbon Nitride Films Prepared by MW-ECR Plasma Enhanced Magnetron SputteringChemical Structure of Carbon Nitride Films Prepared by MW-ECR Plasma Enhanced Magnetron Sputtering
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参考文献(References)：
- 1.A.Y.Liu,M.L.Cohen,Science,245(1989)841
- 2.A.Y.Liu,M.L.Cohen,Phys.Rev.B41(1990)10727
- 3.J.J.Cuomo,P.A.Leary,D.Yu,W.Reuter,and M.Frisch,J.Vac.Sci.Technol.16(1979)299
- 4.H.X.Han,B.J.Feldman,Solid State Comrn.65(1988)921
- 5.M.R.Wixom,J.Am.Ceram.Soc.73(1990)1973
- 6.M.Y.Chen,X.Lin,V.P.Dravid,Y.W.Chung,M.S.Wong,and W.D.Sproul,Surf.Coat.Technol.54/55(1992)360
- 7.X.A.Zhao,C.W.Wong,Y.C.Tsang,Y.W.Wong,P.W.Chan,C.L.Choy,Appl.Phys.Lett.66(1995)2652
- 8.M.Diani,A.Mansour,L.Kubler,J.L.Bischoff,D.Bolmont,Dia.Relat.Mater.3(1994)264
- 9.A.Hoffman,I.Gouzman,R.Brener,Appl.Phys.Lett.64(1994)845
- 10.K.J.Boyd,D.Marlon,S.S.Todorov,A.H.Al-Bayati,J.Kulik,R.A.Zuhr,J.W.Rabalais,J.Vac.Sci.Technol.A13(1995)2110
- 11.Xu Jun,Deng Xinlu,Zhang Jialiang,Lu Wenqi,Ma Tengcai,Thin Solid Films,390(2001)107
- 12.D.Marlon,K.J.Boyd,A.H.Al-Bayati,Phys.Rev.Lett.73(1994)118
- 13.J.Peng,P.Zhang,Y.P.Guo,and G H.Chen,Matt.Lett.29(1996)191
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