王敏,郭会勇,李文芳,张果戈

• 1:广东技术师范学院机电学院
• 2:平高集团有限公司
• 3:华南理工大学材料科学与工程学院

摘要(Abstract)：

用分析纯Ba(OH)2.8H2O和Sr(OH)2.8H2O配制电解液(浓度各为0.2 mol/L),采用微弧氧化技术在工业纯钛板(99.5%)表面原位生成BaxSr(1-x)TiO3铁电薄膜。对不同电流密度、电流频率和反应时间条件下获得的薄膜进行表征,研究了各因素对薄膜物相构成、表面形貌和表面粗糙度的影响。结果表明:所得薄膜均主要由四方相Ba0.5Sr0.5TiO3构成;电流密度为20 A/dm2、电流频率为100 Hz、反应时间为10 min时,所得薄膜最平整、致密、表面粗糙度值最小,且微弧氧化孔洞分布最均匀,测得该薄膜在1 kHz条件下的介电常数为411.3。

关键词(KeyWords)： 铁电薄膜;Ba0.5Sr0.5TiO3;微弧氧化;表面形貌

Abstract:

Keywords:

基金项目(Foundation): 中央高校基本科研业务费专项资金资助(2012ZZ0011)

作者(Author): 王敏,郭会勇,李文芳,张果戈

DOI: 10.13289/j.issn.1009-6264.2013.07.013

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