李成明,陈良贤,刘政,黑立富,吕反修

• 1:北京科技大学材料学科学与工程学院

摘要(Abstract)：

利用非对称双极脉冲磁控溅射制备了不用Co-La掺杂量的Ti-Co-La-N纳米复合薄膜。分别用扫描电子显微镜、X射线衍射、纳米压痕仪、划痕仪以及摩擦磨损仪研究了薄膜的表面形貌、结合力、显微硬度和摩擦学性能。结果表明:复合薄膜主要有TiN相、Co2N相和LaN相组成;复合膜的纤维硬度达到14.61GPa,低于TiN的显微硬度;复合薄膜的显微硬度和结合力都随着Co-La掺杂量的增加而降低;在高速钢基体上复合薄膜的摩擦系数达到了0.6。

关键词(KeyWords)： 纳米复合;Co-La掺杂;TiN

Abstract:

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基金项目(Foundation):

作者(Author): 李成明,陈良贤,刘政,黑立富,吕反修

DOI: 10.13289/j.issn.1009-6264.2010.09.033

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